Fabrication of 3D embedded hollow structures inside polymer dielectric PMMA with femtosecond laser

著录项

• 来源
  《Advanced laser processing and manufacturing》|2016年|1001804.1-1001804.7|共7页
• 会议地点 Beijing(CN)
• 作者

  Chong Zheng; Tao Chen; Anming Hu; Shibing Liu; Junwei Li;

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• 作者单位

  Institute of Laser Engineering, Beijing University of Technology, Pingleyuan 100, Chaoyang District, Beijing 100124, P. R. China,Science and Technology on Optical Radiation Laboratory, Beijing, 100854, P. R. China,Department of Mechanical, Aerospace and Biomedical Engineering, University of Tennessee, Knoxville, Tennessee 37996, U.S.A.;

  Institute of Laser Engineering, Beijing University of Technology, Pingleyuan 100, Chaoyang District, Beijing 100124, P. R. China;

  Department of Mechanical, Aerospace and Biomedical Engineering, University of Tennessee, Knoxville, Tennessee 37996, U.S.A.;

  Institute of Laser Engineering, Beijing University of Technology, Pingleyuan 100, Chaoyang District, Beijing 100124, P. R. China;

  Science and Technology on Optical Radiation Laboratory, Beijing, 100854, P. R. China;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  femtosecond laser; PMMA; internal manufacturing; microchannel; concave microball lens (CMBL); integrated device; microfluidic chip;

  机译：飞秒激光PMMA;内部制造；微通道凹面微球镜（CMBL）;集成设备微流控芯片;