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Formation and Characterization of P(VDF-TeFE) Vilms Using Sol-gel Methods for Application to Micro-generators

机译:P(VDF-TeFE)薄膜的形成与表征-应用溶胶-凝胶法应用于微型发电机

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摘要

In order to apply the P(VDF-TeFE) piezoelectric polymer to the micro-generator based on MEMS technology, we have established a process condition of the film formation. A solvent which is used to cast P(VDF-TeFE) solution is important factor for film formation, and MEK solvent has some problems such as low adhesion for low concentration and drying on a coating process for high concentration. Some problems are suppressed by adding a DMA solvent. However, a DMA solvent affected a molecular structure of the film. A thermal treatment is also an important factor since film stretching cannot be allowed in a spin-coating process. In order to compare the single-solvent solution with the mixed-solvent solution, we have carried out qualitative analysis of the film in formation processes.
机译:为了将P(VDF-TeFE)压电聚合物应用于基于MEMS技术的微型发电机,我们建立了膜形成的工艺条件。用于流延P(VDF-TeFE)溶液的​​溶剂是成膜的重要因素,而MEK溶剂存在一些问题,例如低浓度时附着力低以及高浓度涂布过程中干燥。通过添加DMA溶剂可以抑制某些问题。然而,DMA溶剂影响了膜的分子结构。热处理也是重要的因素,因为在旋涂过程中不能允许膜拉伸。为了比较单溶剂溶液和混合溶剂溶液,我们在形成过程中对膜进行了定性分析。

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  • 会议地点 San Francisco CA(US);San Francisco CA(US)
  • 作者单位

    Department of Electrical, Electronic and Information Engineering, Osaka University,Suita, Osaka, 565-0871, Japan;

    Department of Electrical, Electronic and Information Engineering, Osaka University,Suita, Osaka, 565-0871, Japan;

    Department of Electrical, Electronic and Information Engineering, Osaka University,Suita, Osaka, 565-0871, Japan;

    Division of Advanced Electronics and Optical Science, Osaka University, Toyonaka,Osaka, 560-8531, Japan;

    Department of Electrical, Electronic and Information Engineering, Osaka University,Suita, Osaka, 565-0871, Japan;

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  • 正文语种 eng
  • 中图分类 绝缘材料、电介质及其制品;
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