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Thin-film deposition of mixed-conducting ceramic membranes

机译：混合导电陶瓷膜的薄膜沉积

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摘要

Thin films of oxygen-conducting materials are expected to exhibit enhanced oxygen permeability, due to their reduced diffusion path. Two such materials, yttria-stabilised zirconia (YSZ) and ceria gadolinium oxide (CGO), were deposited onto anodic alumina substrates by electron beam evaporation of the parent materials. Continuous films 200-400 nm thick were characterised through SEM and XRD analysis. It was found that the substrate temperature during deposition strongly influenced the structure and stability of the films, with the original simple cubic structure being retained at deposition temperatures above 450 ℃. Attempts to deposit thin films of a yttria-doped SrCoO_(3-δ) perovskite were unsuccessful, due to melting of the material during deposition and thermal diffusion into the substrate.
机译：期望氧传导材料的薄膜由于减少的扩散路径而表现出增强的氧渗透性。通过母体材料的电子束蒸发将氧化钇稳定的氧化锆（YSZ）和氧化铈氧化lin（CGO）两种材料沉积到阳极氧化铝基板上。通过SEM和XRD分析表征200-400nm厚的连续膜。研究发现，沉积过程中的衬底温度对薄膜的结构和稳定性有很大的影响，在450℃以上的沉积温度下，原始的简单立方结构得以保留。由于在沉积过程中材料熔化和热扩散到基板中，材料沉积氧化钇掺杂SrCoO_（3-δ）钙钛矿的薄膜的尝试失败。

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