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Effect of Pressures on the Chemical Vapor Deposition of BN Using Borazine

机译：压力对硼嗪对BN化学气相沉积的影响

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摘要

Boron nitride coatings have been prepared by chemical vapor deposition using borazine as single precursor at 900 ℃. The effect of the total pressure on the surface morphologies of the coatings was investigated. For low total pressures (≤ 3 kPa), the deposits presents a compact pebble-like surface structure. However, when high total pressures (> 3 kPa) were used, the surface of the coatings presents a loose grain-like feature. When the total pressure increases up to 12 kPa, the coatings shows a porous surface structure. The composition and structure of the deposited coatings were investigated by means of FTIR and XRD analysis. It shows that the coatings have a structure of turbostratic boron nitride.
机译：氮化硼涂层是在900℃下采用硼嗪作为单一前驱体通过化学气相沉积制备的。研究了总压力对涂层表面形貌的影响。对于低总压力（≤3 kPa），沉积物呈现出致密的卵石状表面结构。但是，当使用高总压力（> 3 kPa）时，涂层表面呈现出松散的颗粒状特征。当总压力增加到12 kPa时，涂层显示出多孔表面结构。通过FTIR和XRD分析研究了沉积涂层的组成和结构。它表明该涂层具有涡轮层状氮化硼的结构。

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  • 来源
  • 会议地点 Sanya(CN)
  • 作者

    Jun-Sheng Li; Chang-Rui Zhang; Bin Li; Feng Cao; Si-Qing Wang;

  • 作者单位

    State Key Laboratory of Advanced Ceramic Fibers Composites,College of Aerospace Materials Engineering,National University of Defense Technology,Changsha410073,PR China;

    State Key Laboratory of Advanced Ceramic Fibers Composites,College of Aerospace Materials Engineering,National University of Defense Technology,Changsha410073,PR China;

    State Key Laboratory of Advanced Ceramic Fibers Composites,College of Aerospace Materials Engineering,National University of Defense Technology,Changsha410073,PR China;

    State Key Laboratory of Advanced Ceramic Fibers Composites,College of Aerospace Materials Engineering,National University of Defense Technology,Changsha410073,PR China;

    State Key Laboratory of Advanced Ceramic Fibers Composites,College of Aerospace Materials Engineering,National University of Defense Technology,Changsha410073,PR China;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 工程材料学;
  • 关键词

    borazine; chemical vapor deposition; boron nitride; coatings;

    机译：硼嗪;化学气相沉积;氮化硼;涂料;

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