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首页> 外文会议>Advances in Optical Thin Films >Determination of refractive index profile of ZrO_2 on amorphous and pre-evaporated substrates by reverse engineering
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Determination of refractive index profile of ZrO_2 on amorphous and pre-evaporated substrates by reverse engineering

机译：逆向工程法测定ZrO_2在非晶态和预蒸发基底上的折射率分布

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During the last few years, refractive index profiles are being studied more intensively. Several papers have been written about the use of optical methods, spectrophotometry, ellipsometry, together with reverse engineering, these have yielded interesting results. Here we study the differences of a ZrO_2 film grown on an amorphous substrate and that of a pre-evaporated layer of another material, Y_2O_3. In the first run, two glass substrates have been coated with an Y_2O_3 layer. In the second run a bare glass substrate and the pre-coated Y_2O_3 have been coated with a ZrO_2 layer. Each of the materials used had exactly the same growth conditions for all layers. The only difference was the nature of substrates. The spectra of R and T of both samples have been used for the optical characterisation. Multisample analysis with gradual introduction of new parameters has been carried out. It was found that for the appropriate modelling of the layer, grown on the pre-coated substrate, introduction of an interface layer between the two materials was necessary. The refractive index profiles of both ZrO_2 layers have been determined and discussed.
机译：在最近几年中，对折射率分布进行了更深入的研究。关于光学方法，分光光度法，椭圆偏振法以及逆向工程的使用，已经发表了几篇论文，这些都产生了有趣的结果。在这里，我们研究了在无定形衬底上生长的ZrO_2薄膜与另一种材料Y_2O_3的预蒸发层的差异。在第一轮中，两个玻璃基板已涂有Y_2O_3层。在第二轮中，裸玻璃基板和预涂覆的Y_2O_3已涂覆有ZrO_2层。所使用的每种材料对于所有层都具有完全相同的生长条件。唯一的区别是基材的性质。两种样品的R和T光谱已用于光学表征。逐步引入新参数进行了多样品分析。已经发现，对于在预涂覆的基​​板上生长的层的适当建模，在两种材料之间引入界面层是必要的。已经确定并讨论了两个ZrO_2层的折射率分布。

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