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Large area Sol-Gel optical coatings for the Megajoule Laser prototype

机译：适用于Megajoule Laser原型的大面积Sol-Gel光学涂层

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In the field of thin film coatings, sol-gel (SG) process is an alternative to the conventional Physical Vapor Deposition (PVD) techniques. Sol-gel process is particularly competitive on large-area or fragile substrates by taking advantage of various liquid phase deposition techniques performed at room temperature and atmospheric pressure, coupled with the versatility of organo-metallic chemistry. Developed by the French Commission for Atomic Energy (CEA) since 1985 for its former high-power lasers generation, optimized sol-gel coatings proved also very resistant to laser energy. In 1998, THALES Angenieux (TAGX) was selected by CEA to provide all the sol-gel coatings dedicated to the French Laser MegaJoule (LMJ) prototype, named Ligne d'Integration Laser (LIL). In cooperation with Saint-Etienne Pole Optique et Vision (POV), TAGX initiated the building of a sol-gel technological platform (SGPF) aimed at demonstrating the feasibility of production of optical and functional coatings on large area substrates. A technology transfer was performed by CEA (Le Ripault) to TAGX focusing on the manufacture mainly of single-layer antireflective coatings (SLAR), but also of multi-layer AR-coatings and of multi-layered highly reflective (HR)-coatings. Since beginning of 2001 and using SGPF equipments, TAGX successfully coated within specifications and schedule most of the 300 optics required for LIL activation. After this 2 years1/2 production campaign in pre-industrial conditions, we can now analyse the advantages of each deposition technique used, the repeatability of the several processes and the performance of the various coatings.
机译：在薄膜涂料领域，溶胶-凝胶（SG）工艺是常规物理气相沉积（PVD）技术的替代方法。通过利用在室温和大气压下执行的各种液相沉积技术以及有机金属化学的多功能性，溶胶-凝胶工艺在大面积或易碎基板上具有特别的竞争力。自1985年以来由法国原子能委员会（CEA）为其前代高功率激光器开发而成，经过优化的溶胶-凝胶涂层也证明了对激光能量的抵抗力。 1998年，CEA选择了THALES Angenieux（TAGX），以提供专用于法国Laser MegaJoule（LMJ）原型的所有溶胶-凝胶涂料，称为Ligne d'Integration Laser（LIL）。 TAGX与Saint-Etienne Pole Optique et Vision（POV）合作，启动了溶胶-凝胶技术平台（SGPF）的建设，旨在证明在大面积基材上生产光学和功能性涂层的可行性。 CEA（Le Ripault）向TAGX进行了技术转移，重点生产单层抗反射涂层（SLAR），但也生产多层AR涂层和多层高反射（HR）涂层。自2001年初以来，使用SGPF设备，TAGX成功地按照规格进行了镀膜，并计划了激活LIL所需的300大部分光学器件。在前工业条件下进行了为期2年的1/2生产活动之后，我们现在可以分析所使用的每种沉积技术的优势，几种工艺的可重复性以及各种涂层的性能。

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