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首页> 外文会议>Advances in sensors and Interfaces, 2009. IWASI 2009 >Amorphous silicon balanced photodiode for application in biomolecular analysis
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Amorphous silicon balanced photodiode for application in biomolecular analysis

机译：非晶硅平衡光电二极管在生物分子分析中的应用

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摘要

In this work we present an amorphous silicon/amorphous silicon carbide balanced photodiode structure suitable for differential photocurrent measurements in the ultraviolet (UV) and visible range. The device is a three-terminal structure constituted by two series-connected amorphous silicon p-i-n photodiodes. The structure takes advantage of the differential measurement to reveal very small variations of photocurrent in a large background current signal. Application of the device in detection of biomolecules based on the use of photosensors, can allow the increase of both the dynamic range and the sensitivity of the measurement. Several balanced structures with different geometries have been fabricated utilizing a four mask-step process. The devices have been characterized by measuring the common mode rejection ratio as a function of radiation intensity and wavelength and of bias voltage. Experimental results demonstrated that in dark condition differential currents three orders of magnitude lower than the current of each sensor are detected, while under ultraviolet illumination CMRR values around 40 dB have been achieved independent on the bias voltage. These performances are comparable with those obtained by crystalline differential photodiode structures.
机译：在这项工作中，我们提出了一种非晶硅/非晶碳化硅平衡光电二极管结构，适用于在紫外（UV）和可见光范围内进行差分光电流测量。该器件是由两个串联连接的非晶硅p-i-n光电二极管构成的三端子结构。该结构利用差分测量的优势揭示了大背景电流信号中光电流的很小变化。基于光传感器的使用，该设备在生物分子检测中的应用可以增加动态范围和测量灵敏度。利用四个掩模步骤工艺已经制造了具有不同几何形状的几种平衡结构。该器件的特征是通过测量共模抑制比作为辐射强度和波长以及偏置电压的函数。实验结果表明，在黑暗条件下，检测到的差分电流比每个传感器的电流低三个数量级，而在紫外线照射下，与偏置电压无关，CMRR值已达到40 dB左右。这些性能与通过晶体差分光电二极管结构获得的性能相当。

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