Binary pseudo-random gratings and arrays for calibration of the modulation transfer function of surface profilometers: recent developments

著录项

• 来源
  《Advances in x-ray/EUV optics and components IV》|2009年|P.744803.1-744803.12|共12页
• 会议地点 San Diego CA(US)
• 作者

  Samuel K. Barber; Paul Soldate; Erik H. Anderson; Rossana Cambie; Stefano Marchesini; Wayne R. McKinney; Peter Z. Takacs; Dmitriy L. Voronov; Valeriy V. Yashchuk;

  展开▼
• 作者单位

  Lawrence Berkeley National Laboratory, Berkeley, California, 94720;

  rnRensselaer Polytechnic Institute, Troy, New York, 12180;

  rnLawrence Berkeley National Laboratory, Berkeley, California, 94720;

  rnLawrence Berkeley National Laboratory, Berkeley, California, 94720;

  rnLawrence Berkeley National Laboratory, Berkeley, California, 94720;

  rnLawrence Berkeley National Laboratory, Berkeley, California, 94720;

  rnBrookhaven National Laboratory, Upton, New York, 11973;

  rnLawrence Berkeley National Laboratory, Berkeley, California, 94720;

  rnLawrence Berkeley National Laboratory, Berkeley, California, 94720;

  展开▼
• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类 应用光学;
• 关键词

  surface metrology; surface profilometer; interferometric microscope; modulation transfer function; MTF; power spectral density; PSD; calibration; error reduction; fabrication tolerances; metrology of x-ray optics;

  机译：表面计量表面轮廓仪干涉显微镜调制传递函数； MTF；功率谱密度PSD;校准;减少错误；制造公差； X射线光学计量学;