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首页> 外文会议>Advances in Resist Technology and Processing XXIII pt.1 >Amplification of the index of refraction of aqueous immersion fluids with crown ethers: a progress report
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Amplification of the index of refraction of aqueous immersion fluids with crown ethers: a progress report

机译：用冠醚放大水浸液的折射率：进展报告

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摘要

There is a current need for high refractive index (RI) materials that can be used in aqueous systems for improving 193 nm immersion photolighography. Although heavy metal salts such as Ca~(2+) and Ba~(2+) have the potential to substantially increase the RI of aqueous solutions, the water solubility of these salts with common anions is often too low to achieve concentrations that significantly increase the RI to the desired values. We have therefore investigated the use of crown ethers to enhance the solubility of these cations. Most of the crown ethers are soluble in water, environmentally benign and commercial and inexpensive materials. Details of the preliminary studies on the proposed model system are presented in this paper. 15-crown-5-ether and 12-crown-4-ether are liquids at room temperature and therefore can be used as neat liquids as immersion fluids without dilution in water. Saturation of crown ethers with inorganic salts do not lead to any increase of the refractive index due to the low solubility of those in such an apolar media. Thus, the use of inorganic salt as refractive index enhancement agent does not seem to be a desirable proposition in the present case. Instead, the use of crown ethers or their derivates can be alternative system since these compounds have properties, such as density, viscosity and boiling point, similar to aqueous media.
机译：当前需要可以在水性体系中用于改善193 nm浸没光光刻的高折射率（RI）材料。尽管重金属盐（例如Ca〜（2+）和Ba〜（2+））具有显着提高水溶液的RI的潜力，但这些盐与常见阴离子的水溶性通常太低而无法达到显着增加的浓度RI至所需值。因此，我们研究了冠醚的使用以增强这些阳离子的溶解度。大多数冠醚可溶于水，对环境无害的，商业和廉价的材料。本文介绍了对所提出的模型系统的初步研究的细节。 15皇冠5醚和12皇冠4醚在室温下为液体，因此可以用作纯液体作为浸没液而无需在水中稀释。冠醚用无机盐饱和不会导致折射率增加，这是因为冠醚在此类非极性介质中的溶解度低。因此，在当前情况下，使用无机盐作为折射率增强剂似乎不是理想的提议。取而代之的是，可以使用冠醚或其衍生物，因为这些化合物具有类似于水性介质的特性，例如密度，粘度和沸点。

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