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Block co-polymer guided self-assembly by surface chemical modification: optimization of multiple patterning process and pattern transfer

机译：通过表面化学改性实现嵌段共聚物引导的自组装：优化多种图案化工艺和图案转移

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Block co-polymer (BCP) lithography is becoming an established technique for patterning beyond optical lithographylimitations. It is based on combining the intrinsic property of the block co-polymers to phase separate at the molecularscale with the capabil

机译：嵌段共聚物（BCP）光刻技术已成为一种超越光学光刻技术限制的用于构图的成熟技术。它基于将嵌段共聚物的内在特性与分子级相分离的能力相结合

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《Alternative lithographic technologies IV.》|2012年|P.27.1-27.7|共7页
会议地点 San Jose CA(US)
作者
Lorea Oria; Francesc Pérez-Murano;
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作者单位

Ctr. Nacional de Microelectrónica (Spain);

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会议组织
原文格式 PDF
正文语种 eng
中图分类微电子学、集成电路（IC）;微电子学、集成电路（IC）;
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1. Directed self-assembly of block copolymers by chemical or topographical guiding patterns: Optimizing molecular architecture, thin-film properties, and kinetics [J] . Li Weihua, Mueller Marcus Progress in Polymer Science . 2016,第Null期

机译：通过化学或地形学指导图案指导嵌段共聚物的自组装：优化分子结构，薄膜性质和动力学
2. Guided self-assembly of diblock copolymer thin films on chemically patterned substrates [J] . Xiang-Fa Wu, Yuris A.Dzenis The Journal of Chemical Physics . 2006,第17期

机译：二嵌段共聚物薄膜在化学图案化基材上的引导自组装
3. Guided self-assembly of diblock copolymer thin films on chemically patterned substrates [J] . Wu XF, Dzenis YA The Journal of Chemical Physics . 2006,第17期

机译：二嵌段共聚物薄膜在化学图案化基材上的引导自组装
4. A comparison of the pattern transfer of line-space patterns from graphoepitaxial and chemoepitaxial block co-polymer directed self-assembly [C] . Dan B. Millward, Gurpreet S. Lugani, Ranjan Khurana, Advanced etch technology for nanopatterning III . 2014

机译：石墨外延和化学外延嵌段共聚物定向自组装线间距图案的图案转移比较
5. Directed self-assembly of block copolymers and ternary block copolymer/homopolymer blends on chemically patterned surfaces into device-oriented geometries. [D] . Stoykovich, Mark P. 2007

机译：嵌段共聚物和三元嵌段共聚物/均聚物共混物在化学图案化表面上的定向自组装成面向装置的几何形状。
6. Directed self-assembly of block copolymer films on atomically-thin graphene chemical patterns [O] . Tzu-Hsuan Chang, Shisheng Xiong, Robert M. Jacobberger, -1

机译：原子薄石墨烯化学图案上嵌段共聚物薄膜的定向自组装
7. Guided self-assembly of diblock copolymer thin films on chemically patterned substrates [O] . Wu, Xiang-Fa, Dzenis, Youris A 2007

机译：在化学图案化基底上引导二嵌段共聚物薄膜的自组装
8. Electron Transfer Reactivity Patterns at Chemically Modified Electrodes: Fundamentals and Application to the Optimization of Redox Recycling Amplification Systems Doctoral thesis [R] . Bergren, A. J. 2005

机译：化学修饰电极的电子转移反应模式：基础及其在氧化还原再循环扩增系统优化中的应用博士论文

Block co-polymer guided self-assembly by surface chemical modification: optimization of multiple patterning process and pattern transfer

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