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首页> 外文会议>AMD-vol.256; American Society of Mechanical Engineers(ASME) International Mechanical Engineering Congress and Exposition; 20051105-11; Orlando,FL(US) >NONLINEAR SYSTEM IDENTIFICATION OF A MEMS DUAL-BACKPLATE CAPACITIVE MICROPHONE BY HARMONIC BALANCE METHOD
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NONLINEAR SYSTEM IDENTIFICATION OF A MEMS DUAL-BACKPLATE CAPACITIVE MICROPHONE BY HARMONIC BALANCE METHOD

机译：谐波平衡法识别MEMS双背电容式麦克风的非线性系统

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摘要

This paper presents the nonlinear identification of system parameters for a capacitive dual-backplate MEMS microphone. First, the microphone is modeled by a single-degree-of-freedom (SDOF) second order differential equation with electrostatic and cubic mechanical nonlinearities. A harmonic balance nonlinear identification approach is then applied to the governing equation to obtain a set of algebraic equations that relate the unknown system parameters to the steady-state response of the microphone under the harmonic excitation. The microphone is experimentally characterized and a nonlinear least-squares technique is implemented to identify the system parameters from experimental data. The experimentally extracted bandwidth of the microphone is over 218 kHz. Finally, numerical simulations of the governing equation are performed, using the identified system parameters, to validate the accuracy of the approximate solution. The differences between the properties of the integrated measured center velocity and simulated center displacement responses in the steady state are less than 1%.
机译：本文介绍了电容性双背板MEMS麦克风的系统参数的非线性识别。首先，麦克风是通过具有静电和立方机械非线性的单自由度（SDOF）二阶微分方程建模的。然后，将谐波平衡非线性识别方法应用于控制方程，以获得一组代数方程，这些方程将未知系统参数与麦克风在谐波激励下的稳态响应相关联。对麦克风进行了实验表征，并采用了非线性最小二乘技术从实验数据中识别出系统参数。实验提取的麦克风带宽超过218 kHz。最后，使用识别出的系统参数对控制方程进行数值模拟，以验证近似解的准确性。在稳态下，综合测量的中心速度和模拟的中心位移响应的特性之间的差异小于1％。

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