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首页> 外文会议>AMD-vol.257; American Society of Mechanical Engineers(ASME) International Mechanical Engineering Congress and Exposition; 20061105-10; Chicago,IL(US) >CHARACTERIZATION OF A TUNABLE MEMS RF FILTER
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CHARACTERIZATION OF A TUNABLE MEMS RF FILTER

机译：可调谐MEMS射频滤波器的特性

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摘要

We present a reduced-order analytical model to describe the response of a tunable MEMS RF filter to an input signal whose frequency is in the neighborhood of the passband. It extends our earlier model by allowing for the application of independent DC voltages in addition to an AC input signal. The model is obtained by discretizing the distributed-parameter system using a Galerkin procedure. It consists of two second-order nonlinearly coupled ordinary-differential equations. Using the method of multiple scales, we determine four first-order nonlinear ordinary-differential equations describing the amplitudes and phases of the modes. We found that mismatch between the natural frequencies of the resonators modifies the global modes significantly, leading to localization of the response in either the input or the output beam. We found that the filter can be tuned to operate linearly for a wide range of V_(AC) by choosing a DC voltage that makes the effective nonlinearities vanish. Amplifying the input signal V_(AC) to improve the filter performance creates multi-valued responses beyond a threshold in the case of non-zero effective nonlinearities.
机译：我们提出了一个降阶分析模型来描述可调谐MEMS RF滤波器对频率在通带附近的输入信号的响应。它通过允许除了交流输入信号外还施加独立的直流电压，扩展了我们先前的模型。通过使用Galerkin程序离散化分布参数系统来获得模型。它由两个二阶非线性耦合的常微分方程组成。使用多尺度方法，我们确定了描述模式振幅和相位的四个一阶非线性常微分方程。我们发现，谐振器的固有频率之间的失配会显着修改全局模式，从而导致响应在输入或输出光束中定位。我们发现，通过选择使有效非线性消失的直流电压，可以将滤波器调整为在宽的V_（AC）范围内线性工作。在非零有效非线性的情况下，放大输入信号V_（AC）以改善滤波器性能会产生超出阈值的多值响应。

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