首页> 外文会议>American Ceramic Society Annual Meeting; 20040418-21; Indianapolis,IN(US) >SOL-GEL PROCESSING OF BATIO_3 FOR ELECTRO-OPTIC WAVEGUIDE DEVICES
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SOL-GEL PROCESSING OF BATIO_3 FOR ELECTRO-OPTIC WAVEGUIDE DEVICES

机译:光电波导设备BATIO_3的溶胶处理

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The effects of processing parameters on the optical properties of barium titanate thin films were studied. Barium titanate is a good candidate for electro-optic devices such as a Mach-Zehnder waveguide modulator due to its high electro-optic coefficient. Thin films prepared by sol-gel deposition were optically characterized using a prism coupler. The sol was prepared with a large polymeric additive in an attempt to attain thicker sintered films. The waveguide loss of the film was shown to increase sharply at the onset of organic burn-off of this additive. It is postulated that an optically active 'microstructure' results from this burn-off that causes high loss due to light scattering. This domain-based structure also appears to template the growth of nanosized grains during the final sintering of the film.
机译:研究了工艺参数对钛酸钡薄膜光学性能的影响。钛酸钡由于其高的电光系数而成为诸如Mach-Zehnder波导调制器之类的电光设备的理想选择。使用棱镜耦合器对通过溶胶-凝胶沉积制备的薄膜进行光学表征。为了获得较厚的烧结膜,用大的聚合物添加剂制备了溶胶。薄膜的波导损耗显示出在这种添加剂开始有机燃尽时急剧增加。据推测,这种烧成产生了光学活性的“微结构”,这种烧成由于光散射而导致高损耗。在薄膜的最终烧结过程中,这种基于畴的结构似乎也可以模板化纳米晶粒的生长。

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