ADHESION EFFECTS ON CONTACT OPENING TIME IN MEMS SWITCHES

机译：粘附力对MEMS开关中的触点打开时间的影响

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Previous models and measurements of MEMS adhesion have focused on steady-state adhesion behavior. This approach is inadequate for micromachined switches (such as RF MEMS switches) because it gives no information about the time required for contact opening, an important specification. We propose a technique to measure the switch opening time and present substantial experimental data for switches with gold-gold contacts. The data demonstrate that contact opening time increases dramatically as contact dimple area increases or as pull-apart force or contact resistance decrease. A model of opening time is also presented with model parameters that fit the experimental data.

机译：MEMS粘附力的先前模型和测量都集中在稳态粘附行为上。这种方法不适用于微机械开关（例如RF MEMS开关），因为它没有提供有关触点断开所需时间的重要信息，触点断开时间很重要。我们提出了一种测量开关断开时间的技术，并提供了具有金-金触点的开关的大量实验数据。数据表明，随着触点凹坑面积的增加或拉力或触点电阻的减小，触点打开时间会急剧增加。还提供了一个开放时间模型，并带有适合实验数据的模型参数。

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《American Society of Mechanical Engineers(ASME)/Society of Tribologists and Lubrication Engineers(STLE) International Joint Tribology Conference 2004(IJTC 2004) vol.1 pt.A; 20041024-27; Long Beach,CA(US)》|2004年|P.75-82|共8页
会议地点 Long BeachCA(US)
作者
Brian D. Jensen; John L. Volakis; Linda L.-W. Chow; Katsuo Kurabayashi;
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Dept. of Mechanical Engineering University of Michigan Ann Arbor, Michigan 48109;

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原文格式 PDF
正文语种 eng
中图分类机械摩擦、磨损与润滑;
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1. Significance of Adhesion-Reduced Bouncing in Dynamic Contacts of Ohmic RF MEMS Switches [J] . Wu Yu-Chiao, Yang Wei, Peroulis Dimitrios Microelectromechanical Systems, Journal of . 2015,第5期

机译：欧姆射频MEMS开关动态触点中减少粘附力的反弹的意义
2. Lifetime limitations of ohmic, contacting RF MEMS switches with Au, Pt and Ir contact materials due to accumulation of 'friction polymer' on the contacts [J] . David A. Czaplewski, Christopher D. Nordquist, Christopher W. Dyck, Journal of Micromechanics and Microengineering . 2012,第10期

机译：由于“摩擦聚合物”在触点上的积累，欧姆式接触式RF MEMS开关与Au，Pt和Ir接触材料的使用寿命受到限制
3. Cold- and hot-switching lifetime characterizations of ohmic-contact RF MEMS switches [J] . Chang-Wook Baek, Jong-Man Kim, Sanghyo Lee, IEICE Electronics Express . 2008,第11期

机译：欧姆接触RF MEMS开关的冷和热切换寿命表征
4. ADHESION EFFECTS ON CONTACT OPENING TIME IN MEMS SWITCHES [C] . Brian D. Jensen, Linda L.-W. Chow, Katsuo Kurabayashi, ASME/STLE International Joint Tribology Conference . 2004

机译：关于MEMS开关中接触打开时间的粘附效应
5. Investigation into contact resistance and damage of metal contacts used in RF -MEMS switches. [D] . Gilbert, Kevin W. 2009

机译：研究RF -MEMS开关中使用的接触电阻和金属触点的损坏。
6. Instability of Contact Resistance in MEMS and NEMS DC Switches under Low Force: the Role of Alien Films on the Contact Surface [O] . Haodong Qiu, Hong Wang, Feixiang Ke 2013

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7. Properties of contactless and contacted charging in MEMS capacitive switches [O] . Koutsoureli M., Michalas L., Martins P., 2013

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ADHESION EFFECTS ON CONTACT OPENING TIME IN MEMS SWITCHES

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