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首页> 外文会议>American Society of Mechanical Engineers(ASME)/Society of Tribologists and Lubrication Engineers(STLE) International Joint Tribology Conference 2004(IJTC 2004) vol.1 pt.A; 20041024-27; Long Beach,CA(US) >TRIBOLOGICAL STUDY OF MICRO BEARINGS FOR MEMS APPLICATIONS
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TRIBOLOGICAL STUDY OF MICRO BEARINGS FOR MEMS APPLICATIONS

机译：MEMS应用中微轴承的摩擦学研究

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摘要

Micro sleeve bearings intended for micro rotational machinery were fabricated by X-ray lithography and Ni electroplating. Coated to the working surfaces of the bearings was a 900nm thick uniform tungsten hydrocarbon (W-C:H) coating using an inductively coupled plasma (ICP) assisted, hybrid chemical vapor deposition (CVD)/physical vapor deposition (PVD) tool. Tribological characteristics and mechanical properties of as-electrodeposited Ni micro bearings, annealed Ni micro bearings at 800oC, and W-C:H coated micro bearings were investigated. Potential applications of the micro bearings may involve very light contact pressure (5～30MPa) and high sliding speed, such as micro motors and micro turbines. Conventional pin-on disc test methods on top flat surfaces, (001) planes, cannot effectively predict tribological characteristics because these micro bearings use the sidewall (110 plane) as a working surface. A special micro wear tester and friction tester were developed. Surface morphologies of new and worn bearing surfaces were studied using SEM. Raman Spectroscopy and X-ray Photoelectron Spectroscopy (XPS) characterized the W-C:H coated micro bearings. Test results of the W-C:H coated micro bearings (wear characteristics and friction) are also presented. W-C:H coated micro bearings had much lower wear rate than uncoated bearings. During the wear test, a transfer layer formed on the counter steel shaft even under very small contact pressure, leading to low steady state friction and high wear resistance.
机译：用于微型旋转机械的微型套筒轴承是通过X射线光刻和Ni电镀制成的。使用感应耦合等离子体（ICP）辅助的混合化学气相沉积（CVD）/物理气相沉积（PVD）工具在轴承的工作表面上涂覆900nm厚的均匀钨碳氢化合物（W-C：H）涂层。研究了电沉积Ni微型轴承，800oC退火Ni微型轴承以及W-C：H涂层微型轴承的摩擦学特性和力学性能。微型轴承的潜在应用可能涉及非常轻的接触压力（5〜30MPa）和高滑动速度，例如微型电动机和微型涡轮机。顶部平面（001）平面上的常规销钉圆盘测试方法无法有效预测摩擦学特性，因为这些微型轴承使用侧壁（110平面）作为工作表面。开发了一种特殊的微磨损测试仪和摩擦测试仪。使用SEM研究了新的和磨损的轴承表面的表面形态。拉曼光谱和X射线光电子能谱（XPS）表征了W-C：H涂层的微型轴承。还介绍了W-C：H涂层微型轴承的测试结果（磨损特性和摩擦）。 W-C：H涂层微型轴承的磨损率比未涂层轴承低得多。在磨损测试期间，即使在很小的接触压力下，副钢轴上仍会形成一层转移层，从而导致较低的稳态摩擦和较高的耐磨性。

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