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IN-SITU QUANTITATIVE INTEGRATED TRIBO-SPM NANO-MICRO-METROLOGY

机译:原位定量集成TRIBO-SPM纳米微计量学

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摘要

A novel quantitative nano/micro-tribometer with integrated SPM and optical microscope imaging has been developed to characterize numerous physical and mechanical properties of liquid and solid thin films and coatings, with in-situ monitoring their changes during micro and nano indentation, scratching, reciprocating, rotating and other tribology tests. Both the materials properties and surface topography can be assessed periodically during the tests.
机译:已开发出一种具有集成SPM和光学显微镜成像功能的新型定量纳米/微摩擦计,用于表征液体和固体薄膜及涂层的众多物理和机械性能,并在微米和纳米压痕,刮擦,往复运动期间原位监测其变化,旋转和其他摩擦学测试。在测试过程中,可以定期评估材料的特性和表面形貌。

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