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首页> 外文会议>Annual conference for chemical, biological, radiological, nuclear, and explosives (CBRNE) sensing;SPIE defense, security and sensing (DSS) symposium;Conference for chemical, biological, radiological, nuclear, and explosives (CBRNE) sensing; 20090414-16;2 >Development of a MEMS-Scale Photoacoustic Chemical Sensor for Trace Vapor Detection
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Development of a MEMS-Scale Photoacoustic Chemical Sensor for Trace Vapor Detection

机译：用于痕量蒸气检测的MEMS规模光声化学传感器的开发

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摘要

Photoacoustic spectroscopy (PAS) is a useful monitoring technique that is well suited for trace gas detection. This method routinely exhibits detection limits at the parts-per-million (ppm) or parts-per-billion (ppb) level for gaseous samples. PAS also possesses favorable detection characteristics when the system dimensions are scaled to a microsystem design. Micro-electromechanical systems (MEMS)-scale designs offer the possibility to develop photoacoustic sensors in which the signals would remain at sensitivities similar to or greater than those typically found in macro-scale devices. The objective of the present work is to develop a monolithic MEMS-scale photoacoustic trace gas sensor utilizing the Army Research Laboratory's chemical and biological sensing capability. In order to realize the advantage of photoacoustic sensor miniaturization, light sources of comparable size are required. Quantum cascade lasers (QCLs) have been tested in combination with MEMS-scale photoacoustic cells. This sensing platform has provided favorable detection limits for a standard nerve agent simulant. Current research employs this sensor scheme for the detection of 2,4-dim'trotoluene, a degradation product of TNT. Preliminary results describing the sensor capabilities and performance for the detection of this compound will be presented.
机译：光声光谱法（PAS）是一种非常有用的监测技术，非常适合于痕量气体检测。对于气态样品，此方法通常显示出百万分之几（ppm）或十亿分之几（ppb）的检测限。当系统尺寸按微系统设计缩放时，PAS还具有良好的检测特性。微机电系统（MEMS）规模的设计提供了开发光声传感器的可能性，其中光信号的灵敏度将保持在类似于或大于宏观设备中的灵敏度。本工作的目的是利用陆军研究实验室的化学和生物传感能力，开发单片MEMS规模的光声痕量气体传感器。为了实现光声传感器小型化的优点，需要相当大小的光源。量子级联激光器（QCL）已与MEMS规模的光声单元结合测试。该传感平台为标准神经毒剂模拟物提供了有利的检测极限。当前的研究将这种传感器方案用于检测2，4-二甲基对甲苯，TNT的降解产物。将提供描述该化合物检测的传感器功能和性能的初步结果。

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