Low Level Dissolved Oxygen Measurement Technology

机译：低浓度溶解氧测量技术

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Wet wafer processing frequently specifies low levels of dissolved oxygen in ultrapure rinse waters. Monitoring dissolved oxygen in those waters requires instrumentation with dependable accuracy at low concentrations. Calibration and maintenance requirements should be minimal to assure continuous on-line surveillance of water quality. Described here is a unique combination of dissolved oxygen measurement technology and design that boosts the performance and reliability and simplifies maintenance of this specialized measurement. The theory of operation of these types of sensors as well as their benefits and limitations under various conditions are covered. Associated multi-parameter instrumentation enables the combination of dissolved oxygen with other important measurements such as resistivity, conductivity, pH and/or flowrate.

机译：湿晶圆处理通常要求在超纯冲洗水中溶解氧含量低。监测这些水中的溶解氧需要在低浓度下具有可靠准确性的仪器。校准和维护要求应降至最低，以确保连续在线监测水质。此处描述的是溶解氧测量技术和设计的独特组合，可提高性能和可靠性，并简化此专用测量的维护。涵盖了这些类型的传感器的工作原理以及它们在各种条件下的优点和局限性。关联的多参数仪器可将溶解氧与其他重要测量值（例如电阻率，电导率，pH和/或流量）组合在一起。

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来源
《Annual Semiconductor Pure Water and Chemicals Conference(SPWCC): UPW Track; 20050215-16; Santa Clara,CA(US)》|2005年|P.49-58|共10页
会议地点 Santa ClaraCA(US)
作者
David M. Gray;
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作者单位

Product Management Mettler-Toledo Thornton, Inc. Bedford, Massachusetts, USA;

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原文格式 PDF
正文语种 eng
中图分类 TQ385.41;
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Low Level Dissolved Oxygen Measurement Technology

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