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首页> 外文会议>33rd ASPE annual meeting 2018 >AN INVESTIGATION OF COSINE ERROR FOR SCANNING PROBE MEASUREMENTS OF FREEFORM SURFACES
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AN INVESTIGATION OF COSINE ERROR FOR SCANNING PROBE MEASUREMENTS OF FREEFORM SURFACES

机译：用于扫描自由曲面的探针测量的余弦误差的调查

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摘要

A measurement method that eliminates cosine error, particularly for optical surface metrology, was proposed. Cosine error can be eliminated through always aligning the probe normal to the target surface by rotating the probe attached on the spindle axis. Spindle rotation error was compensated in the surface profile data using a reversal method. The proof of the concept was tested and it was confirmed that the proposed measurement system can be applied for measuring both concave and convex surface profiles. As a result, the measurement method can both eliminate cosine error and scan the large area quickly. In addition, the proposed measurement system can be used for freeform surface measurement by integration with precision machine tools for on machine measurement applications.
机译：提出了一种消除余弦误差的测量方法，特别是对于光学表面计量学。始终通过旋转连接在主轴轴线上的探针使探针始终垂直于目标表面，可以消除余弦误差。使用反转方法在表面轮廓数据中补偿主轴旋转误差。测试了该概念的证明，并证实了所提出的测量系统可用于测量凹面和凸面轮廓。结果，该测量方法既可以消除余弦误差，又可以快速扫描大面积。此外，通过与用于机床测量应用的精密机床集成，可以将建议的测量系统用于自由曲面测量。

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  • 来源
    《33rd ASPE annual meeting 2018》|2018年|466-470|共5页
  • 会议地点 Las Vegas(US)
  • 作者

    ChaBum Lee; Joshua Tarbutton; Tony L. Schmitz;

  • 作者单位

    Department of Mechanical Engineering Texas AM University, College Station, TX;

    Department of Mechanical Engineering and Engineering Science University of North Carolina at Charlotte, Charlotte, NC;

    Department of Mechanical Engineering and Engineering Science University of North Carolina at Charlotte, Charlotte, NC;

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  • 正文语种 eng
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