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首页> 外文会议>33rd ASPE annual meeting 2018 >The Effect of Suqareness on the Performance of the Ultra-Precision Machine
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The Effect of Suqareness on the Performance of the Ultra-Precision Machine

机译：Suqareness对超精密机器性能的影响

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摘要

In this paper, the effect model of squareness on measuring curved surface is independently built on ultra-precision cartesian coordinate measurement machine. The relationship between ideal point and actual measurement point under the affection of squareness is obtained. For a single squareness at 0.1 arcsec, the difference between measurement ideal point and actual measurement point on Sphere and Bicubic Curved Surface is calculated. The peak values of the error distribution of Sphere and Bicubic Curved Surface are 5nm/2nm, 40nm/0.05 nm and 40nm/0.05nm due to the squarenes Sxy , Szy and Szx respectively. For three squareness 0.1 arcsec, the measurement errors of Sphere and Bicubic Curved Surface are 50nm and 2nm respectively. Therefore, the measurement error is differently affected by three squareness when the machine measures different curved surfaces. At last, with the value of squareness increased, the peak value of measurement error is increased. There is a linearity relationship between the peak value and the squareness.
机译：本文是在超高精度笛卡尔坐标测量机上独立建立了直角度对曲面测量的影响模型。得到了矩形度影响下理想点与实际测量点之间的关系。对于在0.1 arcsec处的单个矩形，将计算球体和双三次曲面上的测量理想点与实际测量点之间的差。由于平方Sxy，Szy和Szx，球和双三次曲面的误差分布的峰值分别为5nm / 2nm，40nm / 0.05nm和40nm / 0.05nm。对于三个平方度0.1 arcsec，球体和双三次曲面的测量误差分别为50nm和2nm。因此，当机器测量不同的曲面时，测量误差会受到三个垂直度的不同影响。最后，随着矩形度的增加，测量误差的峰值也增加。峰值和矩形度之间存在线性关系。

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  • 来源
    《33rd ASPE annual meeting 2018》|2018年|501-504|共4页
  • 会议地点 Las Vegas(US)
  • 作者

    Tao Lai; Xiaoqiang Peng; Guipeng Tie; Feng Shi; Lin Zhou; Ye Tian;

  • 作者单位

    College of Artificial Intelligence National University of Defense Technology Changsha, Hu'nan, China,Hu'nan Key Laboratory of Ultra-precision Machining Technology Changsha, Hu'nan, China;

    College of Artificial Intelligence National University of Defense Technology Changsha, Hu'nan, China,Hu'nan Key Laboratory of Ultra-precision Machining Technology Changsha, Hu'nan, China;

    College of Artificial Intelligence National University of Defense Technology Changsha, Hu'nan, China,Hu'nan Key Laboratory of Ultra-precision Machining Technology Changsha, Hu'nan, China;

    College of Artificial Intelligence National University of Defense Technology Changsha, Hu'nan, China,Hu'nan Key Laboratory of Ultra-precision Machining Technology Changsha, Hu'nan, China;

    College of Artificial Intelligence National University of Defense Technology Changsha, Hu'nan, China,Hu'nan Key Laboratory of Ultra-precision Machining Technology Changsha, Hu'nan, China;

    College of Artificial Intelligence National University of Defense Technology Changsha, Hu'nan, China,Hu'nan Key Laboratory of Ultra-precision Machining Technology Changsha, Hu'nan, China;

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  • 正文语种 eng
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