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首页> 外文会议>33rd ASPE annual meeting 2018 >DESIGN OF COMPACT LINEAR NANOPOSITIONING FLEXURE STAGES WITH CENTIMETER TRAVEL RANGE FOR X-RAY INSTRUMENTATION
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DESIGN OF COMPACT LINEAR NANOPOSITIONING FLEXURE STAGES WITH CENTIMETER TRAVEL RANGE FOR X-RAY INSTRUMENTATION

机译：X射线测量仪的行进距离紧凑的线性纳米定位挠性阶段的设计

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摘要

Based on the deformation compensated compact linear guiding mechanism using commercial flexural pivots, prototypes of vertical and horizontal linear nanopositioning flexure stages APS T8-54, T8-55 and T8-56, with centimeter-level travel range, have been designed and tested at the Advanced Photon Source (APS) for x-ray instrumentation applications. Recently, new version of the vertical and horizontal linear nanopositioning flexure stages T8-57 and T8-58, with similar guiding mechanism and further improved compact designs, have been developed at the APS to overcome the performance limitations of precision ball-bearing-based or roller-bearing-based linear stage systems. The mechanical design and its preliminary test results with laser interferometers are described in this paper. Figure 6 shows a 3-D model of combination of the APS T8-57 and T8-58 flexure stages for hard x-ray microprobe and nanoprobe applications.
机译：基于使用商业挠性枢轴的变形补偿紧凑型线性导向机构，已经设计并测试了具有厘米级行程范围的垂直和水平线性纳米定位挠性位移台APS T8-54，T8-55和T8-56的原型。用于X射线仪器应用的高级光子源（APS）。最近，在APS上开发了新版本的垂直和水平线性纳米定位挠性平台T8-57和T8-58，具有相似的导向机制和进一步改进的紧凑型设计，以克服基于精密滚珠轴承或柔性轴承的性能限制。基于滚子轴承的线性平台系统。本文介绍了激光干涉仪的机械设计及其初步测试结果。图6显示了适用于硬X射线微探针和纳米探针应用的APS T8-57和T8-58挠性平台组合的3-D模型。

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  • 来源
    《33rd ASPE annual meeting 2018》|2018年|543-546|共4页
  • 会议地点 Las Vegas(US)
  • 作者

    Deming Shu; Barry Lai; Steven Kearney; Jayson Anton; Wenjun Liu; Jorg Maser; Christian Roehrig; Jonathan Z. Tischler;

  • 作者单位

    Advanced Photon Source, Argonne National Laboratory, Argonne, IL 60439, U.S.A;

    Advanced Photon Source, Argonne National Laboratory, Argonne, IL 60439, U.S.A;

    Advanced Photon Source, Argonne National Laboratory, Argonne, IL 60439, U.S.A;

    Advanced Photon Source, Argonne National Laboratory, Argonne, IL 60439, U.S.A,University of Illinois at Chicago, Chicago, IL 60607, U.S.A;

    Advanced Photon Source, Argonne National Laboratory, Argonne, IL 60439, U.S.A;

    Advanced Photon Source, Argonne National Laboratory, Argonne, IL 60439, U.S.A;

    Advanced Photon Source, Argonne National Laboratory, Argonne, IL 60439, U.S.A;

    Advanced Photon Source, Argonne National Laboratory, Argonne, IL 60439, U.S.A;

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  • 正文语种 eng
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