4 kHz KrF-laser with plate-like electrodes

机译：带板状电极的4 kHz KrF激光

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The electric-discharge KrF-laser with inductive-capacitive discharge stabilization and a pulse repetition rate up to 4 kHz is developed. The multisectional discharge gap with length of 25 cm was formed by 25 pairs of anode-cathode plates. The narrow discharge width of ≤ 1 mm was realized. The buffer gases He and Ne with F_2 as the donor of fluorine were used. The maximum laser energy was ≈ 6 mJ by using Ne/Kr/F_2 mixture at a total pressure of 1.6 ... 3.2 atm. The maximum laser efficiency was ≈ 1.4 %. For measuring of the gas flow velocity in discharge gap the original optical method is used. The maximum gas velocity in the working gap is 19ms~(-1). The average output power of KrF laser is ≈ 12 W at the pulse repetition rate of 3 ... 4 kHz. The relative root-mean-square deviation of the laser pulse energy is σ = 2 ... 3.8 %. It was shown, that laser beam profile formation in a laser cavity essentially depends on a gradient of refractive index of the active medium Δn, was made by free plasma electrons. The value of a refractive index gradient at the KrF laser wavelength is grad n ≥ 10~(-5) cm~(-1).

机译：研发了具有电感电容放电稳定功能和高达4 kHz的脉冲重复频率的放电KrF激光器。由25对阳极-阴极板形成长度为25cm的多部分放电间隙。实现了≤1 mm的窄排放宽度。使用了以F_2作为氟供体的缓冲气体He和Ne。通过在1.6 ... 3.2 atm的总压力下使用Ne / Kr / F_2混合物，最大激光能量约为≈6 mJ。最高激光效率约为1.4％。为了测量放电间隙中的气体流速，使用了原始的光学方法。工作间隙中的最大气体速度为19ms〜（-1）。在3 ... 4 kHz的脉冲重复频率下，KrF激光器的平均输出功率为≈12W。激光脉冲能量的相对均方根偏差为σ= 2 ... 3.8％。已经表明，在激光腔中的激光束轮廓的形成基本上取决于活性等离子体的折射率梯度Δn，其由自由等离子体电子制成。在KrF激光波长处的折射率梯度的值为grad n≥10〜（-5）cm〜（-1）。

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来源
《Atomic and Molecular Pulsed Lasers VI》|2005年|P.626304.1-626304.7|共7页
会议地点 Tomsk(RU)
作者
A.V. ramanov; S.A. Kabaev; B.V. Lazhintsev; V.A. Nor-Arevyan; A.V. Pisetskaya; V.D. Selemir;
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作者单位

Russian Federal Nuclear Center -VNIIEF Mira prosp. 37, 607188 Sarov, Nizhni Novgorod region, Russia;

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原文格式 PDF
正文语种 eng
中图分类脉冲技术、脉冲电路;激光技术、微波激射技术;
关键词
electric-discharge KrF-laser; plate electrodes; inductive-capacitive discharge stabilization; pulse repetition rate; optical inhomogeneities; pulse energy stability;

机译：放电KrF激光;平板电极;电感电容放电稳定化;脉冲重复频率;光学不均匀性;脉冲能量稳定性;

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4 kHz KrF-laser with plate-like electrodes

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