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首页> 外文会议>Bioengineered and bioinspired systems IV >Bio inspired Tactile Sensing Arrays
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Bio inspired Tactile Sensing Arrays

机译：受生物启发的触觉传感阵列

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摘要

This work presents the development of tactile sensing arrays, inspired by cutaneous sensing in humans, for the fingertips of a humanoid robot. The tactile sensing arrays have been developed in two phases. Microelectrode arrays (MEA), having 32 sensing elements - each epoxy adhered with 25 μm thick piezoelectric polymer (PVDF-TrFE) film, were fabricated in the first phase. When connected to the gate of FET devices (external to the chip), each element on MEA acts like an extended gate; thereby facilitating modulation of charge in the induced channel by the charge generated in PVDF-TrFE film - as a result of applied force. Thus, each sensing element converts force into voltage. The tactile sensing arrays developed in second phase work on the same principle but are free from any extended gate. These arrays (having 25 sensing elements) use POSFET (Piezoelectric Oxide Semiconductor Field Effect Transistors) touch sensing elements - in which, piezoelectric polymer film is directly spin coated on the gate area of the FET devices. Thus, a POSFET touch sensing element 'senses and partially processes at same site' - as is done by receptors in human skin. The spatial-temporal performance of these chips is similar to that of skin in the human fingertips.
机译：这项工作提出了触觉感应阵列的发展，受人类皮肤感应的启发，该触觉感应阵列用于人形机器人的指尖。触觉感应阵列已分两个阶段开发。在第一阶段中，制造了具有32个传感元件的微电极阵列（MEA）-每个环氧树脂都粘附有25μm厚的压电聚合物（PVDF-TrFE）膜。当连接到FET器件的栅极（在芯片外部）时，MEA上的每个元素都像一个扩展的栅极；从而通过施加力在PVDF-TrFE薄膜中产生的电荷，促进感应通道中电荷的调制。因此，每个感测元件将力转换成电压。第二阶段开发的触觉传感阵列以相同原理工作，但没有任何延伸的门。这些阵列（具有25个传感元件）使用POSFET（压电氧化物半导体场效应晶体管）触摸传感元件-其中，压电聚合物膜直接旋涂在FET器件的栅极区域上。因此，POSFET触摸感应元件“在同一位置感应并部分处理”，就像人类皮肤中的受体一样。这些芯片的时空性能类似于人类指尖上的皮肤。

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