CONTROL OF THE MICROSTRUCTURE OF POLYCRYSTALLINE DIAMOND AND RELATED MATERIALS VIA AN ENHANCED CVD PROCESS

机译：通过增强的CVD工艺控制多晶金刚石和相关材料的微观结构

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A nondestructive electrostatic deposition technique for seeding substrates with colloidal diamond has been described. An adsorbed layer of charged polymer is used to attach the diamond particles to the underlying substrate. The growth of continuous diamond films over areas up to 80 cm~2 (12.5 sq. in.) has been achieved via ECR CVD.

机译：已经描述了用于用胶体金刚石播种衬底的非破坏性静电沉积技术。带电聚合物的吸附层用于将金刚石颗粒附着到下面的基底上。通过ECR CVD可以实现连续金刚石膜在80 cm〜2（12.5平方英寸）区域内的生长。

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来源
《Ceramic microstructures : Control at the atomic level》|1996年|221-227|共7页
会议地点 Berkeley CA(US)
作者
Melanie L. Carasso; Sherry S. Staehle; Paul A. Demkowicz; Donald R. Gilbert; Rajiv K. Singh; James H. Adair;
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Department of Materials Science and Engineering University of Florida Gainesville, FL 32611-6400;

Department of Materials Science and Engineering University of Florida Gainesville, FL 32611-6400;

Department of Materials Science and Engineering University of Florida Gainesville, FL 32611-6400;

Department of Materials Science and Engineering University of Florida Gainesville, FL 32611-6400;

Department of Materials Science and Engineering University of Florida Gainesville, FL 32611-6400;

Department of Materials Science and Engineering University of Florida Gainesville, FL 32611-6400;

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原文格式 PDF
正文语种 eng
中图分类 TQ174.01;
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CONTROL OF THE MICROSTRUCTURE OF POLYCRYSTALLINE DIAMOND AND RELATED MATERIALS VIA AN ENHANCED CVD PROCESS

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