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Multiport backside-illuminated CCD imagers for high-frame-rate camera a

机译:用于高帧率相机的多端口背面照明CCD成像器

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Abstract: Two multiport, second-generation CCD imager designs have been fabricated and successfully tested. They are a 16-port 512 $MUL 512 array and a 32-port 1024 $MUL 1024 array. Both designs are back illuminated, have on-chip CDS, lateral blooming control, and use a split vertical frame transfer architecture with full frame storage. The 512 $MUL 512 device has been operated at rates over 800 frames per second. The 1024 $MUL 1024 device has been operated at rates over 300 frames per second. The major changes incorporated in the second-generation design are, reduction in gate length in the output area to give improved high-clock-rate performance, modified on-chip CDS circuitry for reduced noise, and optimized implants to improve performance of blooming control at lower clock amplitude. This paper discusses the imager design improvements and presents measured performance results at high and moderate frame rates. The design and performance of three moderate frame rate cameras are discussed. !6
机译:摘要:已经制作并成功测试了两个多端口第二代CCD成像器设计。它们是16端口512 $ MUL 512阵列和32端口1024 $ MUL 1024阵列。两种设计均采用背光照明,具有片上CDS,横向光晕控制,并使用具有全帧存储功能的分离式垂直帧传输架构。 512 $ MUL 512设备的运行速率超过每秒800帧。 1024 $ MUL 1024设备的运行速率超过每秒300帧。第二代设计中的主要变化是:减小输出区域中的栅极长度以提供更高的时钟速率性能;改进的片上CDS电路以降低噪声;以及优化的植入物以改善光晕控制的性能。较低的时钟幅度。本文讨论了成像仪的设计改进,并提出了在高帧速率和中等帧速率下测得的性能结果。讨论了三个中等帧率相机的设计和性能。 !6

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