• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>Charged Particle Optics IV >Design of energy filters for electron microscopes
【24h】

Design of energy filters for electron microscopes

机译：电子显微镜能量过滤器的设计

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Abstract: Software for simulating 3D electric and magnetic fields followed by the direct ray tracing in individual field and combined fields (EO3D, MO3D and CO3D) are well applied to the design of energy filters attached to electron microscopes. When we had designed a high resolution EELS instrument, we had no 3D software, and encountered problems in designing a retarding Wien filter used as the monochromator and analyzer. At that time, electric field homogeneity inside the gap of magnet and the deflection of beam at the fringing region due to the deviation of the Wien condition were unsolved problems. When we designed a low energy reflection electron microscope (LEEM), we had 3D software, and some of the above problems were solved. We used an arc shaped electrode for the beam separator and an eight-pole filter for the analyzer. The coincidence of the magnetic and electric fringing field distributions at the fringing regions (Wien condition) was not perfect but was improved. We have designed an omega filter for in-column energy filtered transmission electron microscope (EFTEM). The omega filter consists of four sector magnets. Optical behavior of the system is very complicated. First, we designed the filter by 2D approximation and then checked by electron trajectories by the 3D software. The designed omega filter works successfully. !15
机译：摘要：用于模拟3D电场和磁场，然后在单个场和组合场（EO3D，MO3D和CO3D）中进行直接射线追踪的软件，非常适合用于电子显微镜附带的能量滤波器的设计。当我们设计高分辨率的EELS仪器时，我们没有3D软件，并且在设计用作单色仪和分析仪的延迟Wien滤波器时遇到了问题。当时，磁体间隙内部的电场均匀性以及由于维恩条件的偏差而导致的在边缘区域的电子束偏转是尚未解决的问题。当我们设计低能反射电子显微镜（LEEM）时，我们拥有3D软件，并且解决了上述一些问题。我们将弧形电极用作束分离器，并将八极滤波器用于分析仪。边缘区域的磁和电场边缘分布的重合性（维恩条件）不是完美的，但得到了改善。我们设计了一种用于柱内能量过滤透射电子显微镜（EFTEM）的欧米茄滤光片。 Ω滤波器由四个扇形磁体组成。该系统的光学行为非常复杂。首先，我们通过2D近似设计滤波器，然后通过3D软件通过电子轨迹进行检查。设计的omega过滤器可以成功工作。 ！15

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号