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Rapid laser scanner based on electro-optical array waveguide

机译:基于电光阵列波导的快速激光扫描仪

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摘要

A novel rapid laser electro-optical scanning system is studied. Theoretical and experimental analysis shows the feasible of the system. Based on the theory of optical phased array, the operating characteristic of the electro-optical waveguide array scanner, the core part of the rapid laser electro-optical scanning system, are specifically investigated. According to the theoretically result of the design parameters of the electro-optical waveguide array scanner, a 4 waveguides array is fabricated by use of AlGaAs crystal through MOCVD. By using of a designed device, steering of laser beam is realized. Experimental results of the AlGaAs-based optical scanner conformed the performance of the scanning system, such as rapid scanning (0~10MHz) and wide scan zone (~30 Deg).
机译:研究了一种新型的快速激光电光扫描系统。理论和实验分析表明了该系统的可行性。基于光学相控阵理论,对快速波导电光扫描系统的核心部分电光波导阵列扫描仪的工作特性进行了研究。根据电光波导阵列扫描仪设计参数的理论结果,利用AlGaAs晶体通过MOCVD法制备了4个波导阵列。通过使用设计的装置,实现了激光束的转向。基于AlGaAs的光学扫描仪的实验结果符合扫描系统的性能,例如快速扫描(0〜10MHz)和宽扫描区(〜30 Deg)。

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