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首页> 外文会议>Conference on advances in resist materials and processing technology XXVI; 20090223-25; San Jose, CA(US) >Polymer Dissolution Model: An Energy Adaptation of the Critical Ionization Theory
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Polymer Dissolution Model: An Energy Adaptation of the Critical Ionization Theory

机译：聚合物溶解模型：临界电离理论的能量适应

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摘要

The current scale of features size in the microelectronics industry has reached the point where molecular level interactions affect process fidelity and produce excursions from the continuum world like line edge roughness (LER). Here we present a 3D molecular level model based on the adaptation of the critical ionization (CI) theory using a fundamental interaction energy approach. The model asserts that it is the favorable interaction between the ionized part of the polymer and the developer solution which renders the polymer soluble. Dynamic Monte Carlo methods were used in the current model to study the polymer dissolution phenomenon. The surface ionization was captured by employing an electric double layer at the interface, and polymer motion was simulated using the Metropolis algorithm. The approximated interaction parameters, for different species in the system, were obtained experimentally and used to calibrate the simulated dissolution rate response to polymer molecular weight and developer concentration. The predicted response is in good agreement with experimental dissolution rate data. The simulation results support the premise of the CI theory and provide an insight into the CI model from a new prospective. This model may provide a means to study the contribution of development to LER and other related defects based on molecular level interactions between distinct components in the polymer and the developer.
机译：微电子工业中当前特征尺寸的尺度已经达到了这样的程度：分子水平的相互作用会影响工艺的保真度，并产生来自连续世界的偏移，例如线边缘粗糙度（LER）。在这里，我们基于基本相互作用能方法，基于临界电离（CI）理论的适应性提出了3D分子水平模型。该模型断言，正是聚合物的离子化部分与显影剂溶液之间的良好相互作用才使聚合物可溶。在当前模型中使用动态蒙特卡洛方法研究聚合物溶解现象。通过在界面处使用双电层捕获表面电离，并使用Metropolis算法模拟聚合物运动。通过实验获得了系统中不同物种的近似相互作用参数，并将其用于校准模拟的溶解速率对聚合物分子量和显影剂浓度的响应。预测的响应与实验溶出率数据非常吻合。仿真结果支持了CI理论的前提，并从一个新的视角提供了对CI模型的见解。该模型可提供一种方法，用于基于聚合物和显影剂中不同成分之间的分子水平相互作用研究显影对LER和其他相关缺陷的贡献。

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