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首页> 外文会议>Conference on Design, Modeling, and Simulation in Microelectronics Nov 28-30, 2000 Singapore >A modular approach for simulation-based optimization of MEMS
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A modular approach for simulation-based optimization of MEMS

机译：用于基于仿真的MEMS优化的模块化方法

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The importance of MEMS optimization concerning performance, power consumption, and reliability increases. In the MEMS design flow a variety of specialized tools is available. For simulation on component level FEM tools (e.g. ANSYS, CFD-ACE+) are widely used. Simulations on system level are carried out with simplified models using simulators like Saber, ELDO or Spice. A few simulators offer tool-specific optimization capabilities but there is a lack of simulator independent support of MEMS optimization. Our approach aims at a flexible combination of simulators and optimization algorithms by partitioning the optimization cycle. This new method is translated into a modular optimization system implemented in JAVA. The main parts (modules) are: 1. Simulation: System behavior is calculated with the actual design parameters. This computation can be a simple evaluation of equations or a complex simulation with a FEM tool or a system simulator, respectively. 2. Error calculation: Simulation results and the specified system behavior are used to calculate the error value (the design objective function) in the actual optimization step. 3. Optimization: The error value is used to compute the new vector of design parameters. 4. Model instantiation: The new parameter values are used to modify the generic model for a new simulation run. The implemented optimization algorithms are: 5. methods without derivatives (e.g. Nelder-Mead-Simplex), 6. methods using derivatives (e.g. Conjugate Gradient or Quasi-Newton) and 7. stochastic approaches (e.g. Simulated Annealing). Interfaces to the simulators ANSYS, ELDO, Saber, and SPICE are implemented. Thus the optimization task can be solved on different levels of model abstraction (FEM, ordinary differential equations, generalized networks, ...). A graphical user interface (GUI) supports control and visualization of the optimization progress. The modules of the optimization system may communicate via the internet (web-based optimization, distributed optimization). The paper covers the partitioning of optimization cycle, the interaction between the modules of the optimization system, first experiences in web-based optimization, and the application of the approach to MEMS optimization.
机译：MEMS优化在性能，功耗和可靠性方面的重要性日益提高。在MEMS设计流程中，可以使用各种专用工具。为了在组件级进行仿真，FEM工具（例如ANSYS，CFD-ACE +）被广泛使用。使用Saber，ELDO或Spice等模拟器，可以使用简化的模型在系统级别进行模拟。一些仿真器提供特定于工具的优化功能，但是缺乏独立于仿真器的MEMS优化支持。我们的方法旨在通过划分优化周期，将模拟器与优化算法灵活组合。将该新方法转换为以JAVA实现的模块化优化系统。主要部分（模块）为：1.仿真：使用实际设计参数计算系统行为。该计算可以分别是方程的简单评估或使用FEM工具或系统模拟器的复杂模拟。 2.误差计算：仿真结果和指定的系统行为用于在实际优化步骤中计算误差值（设计目标函数）。 3.优化：误差值用于计算设计参数的新向量。 4.模型实例化：新的参数值用于修改通用模型以进行新的模拟运行。已实现的优化算法为：5.不使用导数的方法（例如Nelder-Mead-Simplex），6.使用导数的方法（例如共轭梯度或拟牛顿）和7.随机方法（例如模拟退火）。实现了与仿真器ANSYS，ELDO，Sabre和SPICE的接口。因此，可以在不同级别的模型抽象（FEM，常微分方程，广义网络等）上解决优化任务。图形用户界面（GUI）支持优化进度的控制和可视化。优化系统的模块可以通过互联网进行通信（基于网络的优化，分布式优化）。本文涵盖了优化周期的划分，优化系统模块之间的交互，基于Web的优化的初步经验以及该方法在MEMS优化中的应用。

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