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首页> 外文会议>Conference on Design, Modeling, and Simulation in Microelectronics Nov 28-30, 2000 Singapore >Theoretical basis for including small as well as large deflections of quadratic membrane structures in one behavioral model
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Theoretical basis for including small as well as large deflections of quadratic membrane structures in one behavioral model

机译：在一个行为模型中包含二次膜结构的大小变形的理论基础

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Membrane structures are one of the most common elements in microsystems. In order to be able to perform system simulations, behavioral models of their bending lines have to be developed. These models may also be used as a basis for parameter extractions which is a crucial task in the development of microsystems. But parameter extractions can only be performed, if the models used include all of the most important physical effects. Hence the physical basis of these models has to be very profound. Usually a distinction is made between small and large deflections Ref. 1 and only one of these cases is taken into consideration in today's behavioral models of membrane structures. Since some systems' range of operation include both kinds of deflection, models are needed which take both cases into account. The paper presents the theoretical basis for this task. The solution is partially based on the results of Ref. 2 and the behavioral model only calls for one heuristic parameter which was introduced in Ref. 3. All the other quantities are purely physical parameters. Evaluations of this model have taken place using measured data of a capacitive pressure sensor. Finally design optimizations could be carried out in order to increase the sensor's sensitivity as much as possible.
机译：膜结构是微系统中最常见的元素之一。为了能够进行系统仿真，必须开发其弯曲线的行为模型。这些模型也可以用作参数提取的基础，这是微系统开发中的关键任务。但是，如果所使用的模型包括所有最重要的物理效果，则只能执行参数提取。因此，这些模型的物理基础必须非常深刻。通常在小变形和大变形之间进行区分。与图1相同，在当今的膜结构行为模型中仅考虑了其中一种情况。由于某些系统的工作范围包括两种偏转，因此需要考虑两种情况的模型。本文提出了这一任务的理论基础。该解决方案部分基于参考文献的结果。 2和行为模型只需要一个启发式参数，这是参考文献中介绍的。 3.所有其他数量纯粹是物理参数。使用电容式压力传感器的测量数据对该模型进行了评估。最后，可以进行设计优化，以尽可能提高传感器的灵敏度。

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