首页> 外文会议>Conference on Diffractive Optics and Micro-Optics June 18-22, 2000 Quebec City, Canada >Towards the optimal design of binary optical elements with different phase levels using a method of phase mismatch correction
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Towards the optimal design of binary optical elements with different phase levels using a method of phase mismatch correction

机译:利用相位失配校正方法实现具有不同相位水平的二元光学元件的优化设计

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Binary optical elements (BOEs) are considered to be functional devices for modern optical systems and are used in many fields such as optical interconnection, optical signal processing and array illuminator (1-3). The BOE has the special merit of a thin, planar and light-weighted structure and flexibility in design. Although their fabrication process has shown significant progress in recent years, the creation of a nearly ideal binary structure remains difficult. Fabrication errors are still the main cause for a loss in diffraction efficiency of the order of 5 to 20 percent. In this paper, we discuss the effects of fabrication errors on diffraction efficiency of hybrid-level BOEs by using results obtained from numerical analyses and experimental measurements. To improve the diffraction efficiency and numerical aperture (NA), a design procedure combining different phase levels is presented. Furthermore, we propose two methods of correcting the degradation in diffraction efficiency due to a phase mismatch between zones with different numbers of phase levels.
机译:二进制光学元件(BOE)被认为是现代光学系统的功能设备,并用于许多领域,例如光学互连,光学信号处理和阵列照明器(1-3)。京东方具有薄,平,轻的结构和设计灵活性的特殊优点。尽管近年来它们的制造工艺已经显示出显着的进步,但是创建几乎理想的二元结构仍然很困难。制造误差仍然是衍射效率损失约5%至20%的主要原因。在本文中,我们使用数值分析和实验测量的结果来讨论制造误差对混合级BOE衍射效率的影响。为了提高衍射效率和数值孔径(NA),提出了一种结合不同相位水平的设计程序。此外,我们提出了两种校正由于不同相水平数的区域之间的相位不匹配而引起的衍射效率降低的方法。

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