• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>Conference on Emerging Lithographic Technologies VIII pt.2; 20040224-20040226; Santa Clara,CA; US >Linearity of silicon photodiodes for EUV radiation
【24h】

Linearity of silicon photodiodes for EUV radiation

机译：用于EUV辐射的硅光电二极管的线性

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Photodiodes are used as easy-to-operate detectors in the extreme ultraviolet spectral range. The Physikalisch-Technische Bundesanstalt calibrates photodiodes with an 0.3% or better relative uncertainty for the spectral responsivity. These calibrations are based on the comparison of the photodiodes to a cryogenic radiometer as primary detector standard using monochromatized synchrotron radiation, a quasi DC-radiation with a rather low radiant power of about 1 μW. At the customer's, these diodes may be used for strongly pulsed radiation and very different radiant powers. The linearity of the photodiode signal with incident radiant power was studied with EUV radiation. We used quasi-monochromatic direct undulator radiation to achieve high radiant power. The linearity of the photodiodes was tested with quasi-DC illumination for different photon beam spot sizes. A systematic and significant variation of the maximum external photocurrent with the photon beam spot size is shown. The maximum current in linear operation (less than 1% relative saturation) decreased from about 3 mA for 6 mm photon beam diameter to 0.2 mA for 0.25 mm diameter. The corresponding irradiance increased from 30 mW/cm~2 for the 6 mm aperture to about 2 W/cm~2 for the 0.25 mm aperture. This behaviour is attributed to a change in the effective serial resistance with the photon beam size. The values derived from the saturation measurement vary between 65 Ω for a 6 mm and 540 Ω for a 0.25 mm beam. The effect can be explained by the finite conductivity of the thin front contact layer which carries the current to the electrode. For spot sizes much smaller than the diode's active area, the serial resistance scales logarithmically with the spot size.
机译：光电二极管在极紫外光谱范围内用作易于操作的检测器。 Physikalisch-Technische Bundesanstalt用光谱响应度的相对不确定度校准0.3％或更高的光电二极管。这些校准基于将光电二极管与作为主要检测器标准的低温辐射计（使用单色同步加速器辐射）进行比较，该同步辐射是单色同步辐射，具有大约1μW的相当低的辐射功率。在客户方面，这些二极管可用于强脉冲辐射和非常不同的辐射功率。用EUV辐射研究了光电二极管信号与入射辐射功率之间的线性关系。我们使用准单色直接波荡器辐射来实现高辐射功率。对于不同的光子束光斑大小，使用准DC照明测试了光电二极管的线性。显示了最大外部光电流随光子束光斑尺寸的系统性显着变化。线性操作中的最大电流（相对饱和度小于1％）从6 mm光子束直径的约3 mA降低到0.25 mm直径的0.2 mA。相应的辐照度从6 mm孔径的30 mW / cm〜2增加到0.25 mm孔径的约2 W / cm〜2。此行为归因于有效串联电阻随光子束大小的变化。从饱和度测量得出的值在6毫米的65Ω和0.25毫米光束的540Ω之间变化。可以通过将电流带到电极的薄前接触层的有限电导率来解释这种影响。对于光斑尺寸远小于二极管有效面积的情况，串行电阻与光斑尺寸成对数比例变化。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号