Design, characterization and applications of multilayer micro-optics

机译：多层微光学的设计，表征和应用

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摘要

Multilayer micro-optics combines refractive beam shaping with wavelength selective multiple interference. Layer composition and thickness distribution were optimized by advanced simulation software. Components were fabricated by mask-shaded vapor deposition with planetary rotation. Surface profiles were characterized interferometrically. For two-dimensional reflectance mapping, a high-accuracy automated system was developed. Micro-mirror arrays for self-imaging resonators, mode selective mirrors for miniaturized solid-state lasers and angular-adapted graded AR-coatings for microlenses are presented as applications.

机译：多层微光学将折射光束整形与波长选择性多重干涉相结合。层组成和厚度分布通过先进的仿真软件进行了优化。组件是通过在行星旋转的情况下进行遮罩式气相沉积来制造的。表面轮廓通过干涉法表征。对于二维反射率映射，开发了高精度的自动化系统。提出了用于自成像谐振器的微镜阵列，用于微型固态激光器的模式选择镜以及用于微透镜的角度适应渐变AR涂层。

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《Conference on Gradient Index, Miniature, and Diffractive Optical Systems Ⅱ Aug 2-3, 2001, San Diego, USA》|2001年|p.40-49|共10页
会议地点 San Diego CA(US)
作者
Ruediger Grunwald; Stefan Nerreter; Uwe Griebner; Hans-Joachim Kuehn;
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作者单位

Max-Born-Institute for Nonlinear Optics and Short-Pulse Spectroscopy, Max-Born-Str. 2A, 12489 Berlin, Germany;

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会议组织
原文格式 PDF
正文语种 eng
中图分类物理学;
关键词
micro-optics; thin-films; multilayer; nonuniform; micro-mirrors; graded AR-coatings;

机译：微光学薄膜多层不均匀微镜；分级增透膜;

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Design, characterization and applications of multilayer micro-optics

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