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首页> 外文会议>Conference on industrial and commercial applications of smart structures technologies; 20090309-10; San Diego, CA(US) >Design and Microfabrication of a PVDF Acoustic Sensor
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Design and Microfabrication of a PVDF Acoustic Sensor

机译：PVDF声传感器的设计与微制造

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[SMART VEHICLES WORKSHOP] This paper presents the design, theoretical analysis, microfabrication and testing of a new type of millimeter-size acoustic sensor using Polyvinylidene Fluoride (PVDF) micropillars and patterned electrodes. The sensor has the potential to achieve 100× the sensitivity of existing commercial sensors in combination with a sound pressure level (SPL) range of 35-180 dB and a frequency bandwidth of at least 100 kHz. A constrained optimization algorithm has been developed as a function of geometric parameters (sensor footprint, diameter and height of the micropillars, gap between pillar edges, and number of pillars) and electrical parameters of the sensor and conditioning amplifier. Details of the fabrication process are described. Nanoindentation tests demonstrate that the PVDF micropillar sensor exhibits piezoelectric responses under an applied voltage or strain, thus demonstrating the sensor concept. Operational amplifier circuit design and experimental setup are also described and developed.
机译：[智能汽车车间]本文介绍了一种使用聚偏二氟乙烯（PVDF）微柱和图案化电极的新型毫米尺寸声传感器的设计，理论分析，微加工和测试。结合35-180 dB的声压级（SPL）范围和至少100 kHz的频率带宽，该传感器具有达到现有商用传感器100倍灵敏度的潜力。根据几何参数（传感器覆盖区，微柱的直径和高度，柱边缘之间的间隙以及柱的数量）以及传感器和调节放大器的电参数，开发了约束优化算法。描述了制造过程的细节。纳米压痕测试表明，PVDF微柱传感器在施加的电压或应变下显示出压电响应，从而证明了传感器的概念。还描述和开发了运算放大器电路的设计和实验装置。

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