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首页> 外文会议>Conference on Integrated Optical Devices: Fabrication and Testing, Oct 30-Nov 1, 2002, Brugge, Belgium >Fabrication by rf-sputtering processing of Er~(3+) / Yb~(3+)-codoped silica- titania planar waveguides
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Fabrication by rf-sputtering processing of Er~(3+) / Yb~(3+)-codoped silica- titania planar waveguides

机译：Er〜（3 +）/ Yb〜（3+）共掺杂二氧化钛平面波导的射频溅射制备

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摘要

Er~(3+)/Yb~(3+)-codoped 92SiO_2-8TiO_2 planar waveguides, with 1.2 mol% Er and molar ratio Er/Yb of 2, were fabricated by rf-sputtering technique. The active films were deposited on silica-on-silicon and v-SiO_2 substrates. The parameters of preparation were chosen in order to optimize the waveguides for operation in the NIR region with particular attention to the minimization of the losses. The thickness of the waveguides and the refractive index at 632.8 and 543.5 nm were measured by an m-line apparatus. The losses, for the TE_o mode, were evaluated at 632.8 and 1300 nm. The structural properties were investigated with several techniques such as Secondary Ion Mass Spectrometry, Energy Dispersive Spectroscopy and Raman Spectroscopy. All waveguides were single-mode at 1550 nm. An attenuation coefficient of 0.5 dB/cm at 632.8 nm and 0.1 dB/cm at 1300 nm were measured. The emission of ~4I_(13/2) →~4I_(15/2) of Er~(3+) ion transition with a 40 nm bandwidth was observed upon excitation at 981 and 514.5 nm in the TE_o mode. Back energy transfer from Er~(3+) to Yb~(3+) was demonstrated. Photoluminescence excitation Spectroscopy was used to obtain information about the effective excitation efficiency of Er~(3+) ions by co-doping with Yb~(3+) ions.
机译：通过rf溅射技术制备了掺有Er〜（3 +）/ Yb〜（3+）的92SiO_2-8TiO_2平面波导，其中Er为1.2mol％，Er / Yb的摩尔比为2。活性膜沉积在硅基二氧化硅和v-SiO_2衬底上。选择准备参数是为了优化在NIR区域中工​​作的波导，尤其要注意损耗的最小化。通过m线设备测量波导的厚度以及在632.8和543.5nm的折射率。对于TE_o模式，损耗在632.8和1300 nm处评估。用诸如二次离子质谱法，能量分散光谱法和拉曼光谱法的几种技术研究了结构性质。所有波导均为1550 nm的单模。在632.8nm处测得的衰减系数为0.5dB / cm，在1300nm处测得的衰减系数为0.1dB / cm。在TE_o模式下在981和514.5 nm处激发时，观察到带宽为40 nm的Er〜（3+）离子跃迁的〜4I_（13/2）→〜4I_（15/2）发射。证明了从Er〜（3+）到Yb〜（3+）的背向能量转移。通过与Yb〜（3+）离子共掺杂，使用光致发光激发光谱法获得有关Er〜（3+）离子的有效激发效率的信息。

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