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首页> 外文会议>Conference on Integrated Optical Devices: Fabrication and Testing, Oct 30-Nov 1, 2002, Brugge, Belgium >Nd:YVO_4 and YVO_4 laser crystals integration by a direct bonding technique
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Nd:YVO_4 and YVO_4 laser crystals integration by a direct bonding technique

机译：通过直接键合技术集成Nd：YVO_4和YVO_4激光晶体

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摘要

Laser crystal integration using a neodymium-doped yttrium vanadate (or orthovanadate) laser crystal, and non-doped yttrium vanadate crystals that function as cold fingers has been demonstrated. In our bonding technique of YVO_4 crystals, a newly developed dry etching process was adopted in the preparation for contact of mechanically polished surfaces. In the successive heat treatment process, temperature optimization was essential to get rid of precipitation of vanadic acid caused by the thermo-chemical reaction in a vacuum furnace. The bonded surface of 5 mm x 6 mm was studied via optical characteristics and magnified inspection. In addition, we also compared the integrated crystal with a normal one in laser output power pumped by a CW laser diode. From these experiments, it was clear that the integrated Nd:YVO_4 laser crystal, securing the well-improved thermal conductivity, can increase laser output power nearly twice that of the conventional single crystal which was cracked in high power laser pumping due to its intrinsic poor thermal conductivity.
机译：已经证明了使用掺钕钒酸钇（或原钒酸盐）激光晶体和用作冷指的未掺杂钒酸钇晶体的激光晶体集成。在我们的YVO_4晶体的键合技术中，采用了新开发的干法蚀刻工艺来制备与机械抛光表面的接触。在连续的热处理过程中，温度优化对于消除由真空炉中的热化学反应引起的钒酸沉淀至关重要。通过光学特性和放大检查研究了5mm×6mm的粘合表面。此外，我们还比较了集成晶体与CW激光二极管泵浦的正常激光输出功率。从这些实验中可以明显看出，集成的Nd：YVO_4激光晶体确保了良好的导热性，可以提高激光输出功率，几乎是传统单晶的两倍，传统单晶由于其固有的劣势而在高功率激光泵浦中破裂。导热系数。

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