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首页> 外文会议>Conference on Integrated Optics Devices Ⅴ Jan 23-25, 2001, San Jose, USA >Silicon-Based Integrated Optical Pressure Sensor Using Intermodal Interference between TM-like and TE-like Modes
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Silicon-Based Integrated Optical Pressure Sensor Using Intermodal Interference between TM-like and TE-like Modes

机译：基于硅的集成光学压力传感器，利用类似TM和TE的模式之间的联运干扰

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摘要

A silicon-based integrated optical pressure sensor using an intermodal interference between the fundamental TM-like and TE-like modes is described. The sensor consists of a micromachined rectangular diaphragm and a straight polystyrene optical waveguide passing across the diaphragm. The use of the intermodal interference has the potential advantage of shortening the sensor length since it needs neither a Y-branch nor a 3-dB coupler. In the presence of the pressure difference on the diaphragm, the phase difference is yielded between the two guided modes by an anisotropic index change induced by the elasto-optic effect. The phase difference is finally transformed into a change in light intensity by an analyzing polarizer. We fabricated a sensor with a 1.2 mmX 10 mmX20 μm diaphragm over which the waveguides were formed at 50 μm intervals. In the experiment, a linearly-polarized He-Ne laser beam at 633 nm was coupled to the two guided modes at equal intensity. The output intensity through a polarizer was sinusoidally changed at a period of 64 kPa, corresponding to a phase sensitivity of 98 mrad/kPa, for the waveguide nearest to the diaphragm edge. The measurement was carried out for other waveguide positions. The largest sensitivity was obtained for the waveguide nearest to the diaphragm edge as theoretically expected.
机译：描述了一种基于硅的集成光学压力传感器，该传感器在基本TM型和TE型模式之间使用了联运干扰。该传感器由微机械加工的矩形隔膜和穿过隔膜的直聚苯乙烯光波导组成。使用联运干扰具有缩短传感器长度的潜在优势，因为它既不需要Y分支也不需要3dB耦合器。在膜片上存在压力差的情况下，两种引导模式之间的相差是由弹性光效应引起的各向异性折射率变化产生的。最后，通过分析偏振器将相位差转换为光强度的变化。我们制造了一个传感器，该传感器具有1.2 mmX 10 mmX20μm的膜片，在其上以50μm的间隔形成波导。在实验中，将633 nm的线性偏振He-Ne激光束以相同的强度耦合到两个引导模式。对于最靠近膜片边缘的波导，通过偏振器的输出强度以64 kPa的周期正弦变化，对应于98 mrad / kPa的相位灵敏度。对其他波导位置进行了测量。如理论上所期望的，对于最接近膜片边缘的波导获得了最大的灵敏度。

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