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首页> 外文会议>Conference on Integrated Optics Devices Ⅴ Jan 23-25, 2001, San Jose, USA >Vapor-phase proton-exchange in lithium tantalate for high-quality waveguides fabrication
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Vapor-phase proton-exchange in lithium tantalate for high-quality waveguides fabrication

机译：钽酸锂中汽相质子交换用于高质量波导的制造

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摘要

Vapor-phase proton-exchange has been applied to lithium tantalate for the first time, as a waveguide fabrication technique. This technique provides alpha-phase waveguides without the need for annealing. A sealed ampoule set-up has been used employing pure benzoic acid as the vapor source. Various waveguides have been realized and optically characterized by means of standard m-lines spectroscopy. The profile shape is a step plus an exponential tail toward the substrate, as that found for vapor-phase proton-exchange waveguides in lithium niobate. The total depth of the refractive index profile increases with the exchange time, following a linear diffusion model. The ordinary index change has been determined by an interferometric method, giving values that confirmed the alpha-crystallographic phase of the fabricated waveguides. The propagation losses have been measured with a new method using an isosceles coupling prism and an out-coupling objective. The values found for the different modes of the various waveguides ranged from 0.5 to 0.8 dB/cm. An aging phenomenon in the fabricated waveguides has been observed during the first month after the exchange process. The extraordinary index change decreased of 5%, while the optical depth increased of 2%. Application of this technology to periodically poled substrates for QPM devices seems feasible.
机译：气相质子交换作为波导制造技术首次应用于钽酸锂。该技术无需退火即可提供α相波导。密封的安瓿瓶装置已被采用，采用纯苯甲酸作为蒸气源。已经通过标准的m线光谱学实现了各种波导并对其进行了光学表征。轮廓形状是一个台阶，加上朝向基板的指数尾部，就像铌酸锂中气相质子交换波导所发现的那样。遵循线性扩散模型，折射率分布的总深度随交换时间而增加。普通折射率的变化已通过干涉法确定，给出的值证实了所制造波导的α晶相。使用等腰耦合棱镜和外耦合物镜的新方法测量了传播损耗。对于各种波导的不同模式发现的值在0.5至0.8dB / cm的范围内。在更换过程后的第一个月内，观察到了人造波导中的老化现象。非凡的折射率变化减少了5％，而光学深度增加了2％。将该技术应用于QPM器件的周期性极化基板似乎是可行的。

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