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首页> 外文会议>Conference on Integrated Optics Devices Ⅴ Jan 23-25, 2001, San Jose, USA >Development on a fabrication process for plastic optical modules with nano-3D structures for communication
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Development on a fabrication process for plastic optical modules with nano-3D structures for communication

机译：用于通信的纳米3D结构塑料光学模块制造工艺的开发

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In recent years, the demand for the high efficiency diffractive optical element is booming for large capacity storage devices. Instead of conventional lithographic approach to fabricate molds, we have developed a new technology utilizing an electron beam writer in order to produce molds used for injection molding high-accuracy diffractive optical elements. Although we have already developed a technology to produce plastic diffractive elements, with the new technology we can produce blazed and relief features, which are not achievable through the conventional approach. By introducing a mathematical expression to give exact dosage necessary for particular depth from 0.7 to 1.3 micron ad from 1.5 to 5.0 microns pitch, high-accuracy nano-3D features can be controlled within +/-50 nm in pitch and +/-35 nm in depth. This blazed structure was designed to achieve 41% identical 0th and +1st order and the result is 39.0% for 0th and 37.9% for +lst order at 780 nm.
机译：近年来，对于大容量存储装置，对高效衍射光学元件的需求正在迅速增长。代替传统的光刻方法来制造模具，我们已经开发了一种利用电子束记录器的新技术，以生产用于注塑成型高精度衍射光学元件的模具。尽管我们已经开发了一种生产塑料衍射元件的技术，但是通过新技术，我们可以生产出凹凸效果，这是传统方法无法实现的。通过引入数学表达式以给出从0.7到1.3微米的特定深度和1.5到5.0微米间距所需的精确剂量，可以将高精度的nano-3D特征控制在+/- 50 nm的间距和+/- 35 nm的范围内深入。设计了这种炽烈的结构，以实现41％的0级和+1级相同，结果在780 nm处0级为39.0％，+ 1级为37.9％。

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