• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>Conference on Integrated Optics: Devices, Materials, and Technologies Ⅵ Jan 21-23, 2002 San Jose, USA >Development of Polymeric Materials for Waveguide Components
【24h】

Development of Polymeric Materials for Waveguide Components

机译：波导部件用高分子材料的开发

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

The scalability to mass production and low cost are two driving forces towards multimode waveguide technologies. Organic-inorganic hybrid materials realized by sol-gel technology are promising choices for the fabrication of integrated optical circuits. This paper describes fabrication and characterization of the photo-patternable materials that are based on the sol-gel technology. The materials can be processed directly, using UV lithographic processing. Tailored polymeric materials are achieved, avoiding the use of the previously developed pre-hydrolyzed zirconium sol-gel precursors, which exhibit a lack of environmental stability. Films, which behave as a negative tone photoresist under UV-exposure, are fabricated by the spin-coating method on various substrates. The procedure shows the possibility for tailoring the refractive index and birefringence of the materials by varying the composition concentrations of the hybrid polymer system. Refractive indices vary from 1.4770 to 1.4950. The synthesized material also exhibits the possibility for birefringence optimization depending on the composition concentrations. The direct lithography process was demonstrated on various substrate materials (i.e., silicon wafer, glass, quartz, as well as flexible plastics, LTCC and semiconductor materials). The film waveguides are characterized by using of prism coupling technique at various wavelengths. The morphology of the optical structures is measured with a white-light interferometer.
机译：大规模生产的可扩展性和低成本是迈向多模波导技术的两个驱动力。通过溶胶-凝胶技术实现的有机-无机杂化材料是制造集成光学电路的有前途的选择。本文介绍了基于溶胶-凝胶技术的可光图案化材料的制造和表征。可以使用UV光刻工艺直接加工材料。获得了定制的聚合物材料，避免了使用先前开发的预水解锆溶胶-凝胶前体，该前体表现出缺乏环境稳定性。通过旋涂法在各种基材上制备在紫外线曝光下充当负性光致抗蚀剂的膜。该方法显示了通过改变杂化聚合物系统的组成浓度来调整材料的折射率和双折射的可能性。折射率从1.4770到1.4950。合成的材料还表现出根据组成浓度进行双折射优化的可能性。在各种衬底材料（即硅晶片，玻璃，石英以及柔性塑料，LTCC和半导体材料）上演示了直接光刻工艺。膜波导的特征在于使用各种波长的棱镜耦合技术。光学结构的形态用白光干涉仪测量。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号