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首页> 外文会议>Conference on Interferometry XI: Applications, Jul 10-11, 2002, Seattle, USA >Simultaneous distance, slope, curvature and shape measurement with a multi-purpose interferometer
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Simultaneous distance, slope, curvature and shape measurement with a multi-purpose interferometer

机译：使用多功能干涉仪同时测量距离，坡度，曲率和形状

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The use of interferometers is usually divided into two areas. One of them is that of single-dimensional length measurement where the distance along an optical axis is measured, often with more than one wavelength for absolute distance determination. Here one "beam" is considered. The other area is interferometric surface or wavefront measurement where the laterally varying phase distribution of a largely extended wavefront is the property of interest. In this presentation a combination of the two types of use which opens up quite new and challenging applications will be presented. One of the applications which requires simultaneous measurement of distance, slope and curvature is high-accuracy form measurement of aspheres and free form surfaces by the Large Area Curvature Scanning (LACS) method. For a high-accuracy LACS set-up it is most important to measure (and control) the absolute distance between the interferometer and the surface under test (including the multiples of the half wavelength), as well as the slope of the wavefront. In the present set-up, a commercial general purpose interferometer is used. The simultaneous measurement of distance, slope, curvature and shape with this instrument is presented. Special emphasis is laid on the specific fringe evaluation method adapted to the determination of these quantities. It uses a model of the real interferogram image and the superimposed disturbing effects. A suitable global optimization method allows the desired quantities to be determined rapidly and reliably. For the future use of LACS, a new, specifically designed multi-purpose interferometer is introduced which can be used in LACS systems with nanometer form measurement accuracy.
机译：干涉仪的使用通常分为两个区域。其中之一是一维长度测量，其中测量沿光轴的距离，通常使用一个以上的波长来确定绝对距离。这里考虑一个“光束”。另一个领域是干涉测量表面或波阵面测量，其中很大程度扩展的波阵面的横向变化相位分布是我们感兴趣的属性。在本演示文稿中，将介绍两种使用方式的组合，这将带来相当新颖且具有挑战性的应用程序。需要同时测量距离，坡度和曲率的应用之一是通过大面积曲率扫描（LACS）方法对非球面和自由曲面进行高精度形状测量。对于高精度LACS设置，最重要的是测量（和控制）干涉仪与被测表面之间的绝对距离（包括半波长的倍数）以及波前的斜率。在本装置中，使用了商用通用干涉仪。介绍了用该仪器同时测量距离，斜率，曲率和形状的方法。特别强调适用于确定这些数量的特定条纹评估方法。它使用真实干涉图图像和叠加干扰效应的模型。合适的全局优化方法可以快速，可靠地确定所需量。为了将来使用LACS，引入了一种专门设计的新型多功能干涉仪，该干涉仪可用于具有纳米级测量精度的LACS系统中。

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