首页> 外文会议>Conference on Interferometry XI: Applications, Jul 10-11, 2002, Seattle, USA >Development and validation of digital micro-holo interferometric system for micro mechanical testing
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Development and validation of digital micro-holo interferometric system for micro mechanical testing

机译:用于微机械测试的数字微全息干涉仪系统的开发和验证

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The development of a digital micro-holo interferometric system is presented in this paper. With respect to the specific requirements on the microscopic scheme in micromeasurement, application of long distance microscope is introduced with emphasis. With its corporation, the achievable microscopic resolution is studied and demonstrated by the use of the standard resolution test target. Experiments are performed to testify the capacity of the proposed system in resolving structures with lateral dimensions at the micro level. A critical issue, validation of the developed system, is also addressed. Aided by finite element analysis and analytical calculation, experimental measurement with the system is examined using a hybrid approach. To evaluate the performance of the system, microbeam experiment is presented. Results measured with the system, as well as the numerical simulations are obtained. Quantitative comparisons are carried out in terms of load-induced variations of the test sample, based on which the conclusions are given.
机译:本文介绍了一种数字微全息干涉仪系统的开发。针对显微测量中显微方案的具体要求,重点介绍了长距离显微镜的应用。与公司合作,通过使用标准分辨率测试目标来研究和演示可实现的显微分辨率。进行实验以验证所提出的系统在解析横向尺寸为微观水平的结构时的能力。还解决了一个关键问题,即对已开发系统的验证。在有限元分析和分析计算的帮助下,使用混合方法检查了系统的实验测量。为了评估系统的性能,提出了微束实验。获得了使用该系统测量的结果以及数值模拟。根据负载引起的测试样品变化进行定量比较,并在此基础上得出结论。

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