Measurement of NO, COF_2, and H_2O with a single mid-infrared laser

机译：用单个中红外激光测量NO，COF_2和H_2O

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A single IV-VI semiconductor mid-IR laser was used to measure NO, COF_2, and H_2O molecules. Potential applications for such measurements include medical diagnostics and plasma etching endpoint detection in semiconductor manufacturing.

机译：单个IV-VI半导体中红外激光用于测量NO，COF_2和H_2O分子。这种测量的潜在应用包括半导体制造中的医学诊断和等离子体蚀刻终点检测。

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来源
《Conference on Laser Applications to Chemical and Environmental Analysis, Feb 11-13, 2000, Santa Fe, New Mexico》|2000年|p.84-86|共3页
会议地点 Santa Fe NM(US)
作者
Patrick J. McCann; I-Na Chao; Khosrow Namjou;
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作者单位

School of Electrical and Computer Engineering, University of Oklahoma, 202 West Boyd Street, Room 219, Norman, OK 73019;

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会议组织
原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
关键词
spectrometers and spectroscopic instrumentation; semiconductor lasers;

机译：光谱仪和光谱仪器；半导体激光器;

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2. Ultrafast laser-absorption spectroscopy for single-shot, mid-infrared measurements of temperature, CO, and CH4 in flames [J] . Optics Letters . 2020,第2期

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3. Single-ended mid-infrared laser-absorption sensor for simultaneous in situ measurements of H2O, CO2, CO, and temperature in combustion flows [J] . Peng Wen Yu, Goldenstein Christopher S., Spearrin Mitchell, Applied optics . 2016,第33期

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4. Measurement of NO, COF_2, and H_2O with a single mid-infrared laser [C] . Patrick J. McCann, I-Na Chao, Khosrow Namjou Conference on laser applications to chemical and environmental analysis . 2000

机译：使用单一中红外激光测量否，COF_2和H_2O
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7. Ultrafast laser-absorption spectroscopy for single-shot, mid-infrared measurements of temperature, CO, and CH4 in flames [O] . Ryan J. Tancin, Ziqiao Chang, Mingming Gu, 2020

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8. Single Particle Absorption Measurements in the Mid-Infrared by Exploiting Elastic Scattering [R] . Aptowicz, K. , Pan, Y. , Chang, R. K. , 2005

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Measurement of NO, COF_2, and H_2O with a single mid-infrared laser

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