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首页> 外文会议>Conference on laser applications in microelectronic and optoelectronic manufacturing VII; 20090126-29; San Jose, CA(US) >Programmable picosecond pulse packets for micromachining with multiwatt UV fiber lasers
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Programmable picosecond pulse packets for micromachining with multiwatt UV fiber lasers

机译：可编程皮秒脉冲数据包，用于多瓦紫外光纤激光器的微加工

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摘要

A laser system delivering packets of 100 MHz picosecond pulses at wavelengths of 532 nm and 355 nm have been shown to ablate clean trenches in a variety of substrates used in photovoltaic panels. The ability to choose wavelength offers process selectivity: 532 nm light ablates amorphous Si but not the underlying transparent conducting oxide, while 355 nm light scribes through both layers. The high repetition rate ensures good overlap and thorough ablation. The high repetition rate also reduces ablation thresholds, but in carefully tuned cases can lead to violent explosions that remove material in a diameter several times larger than the spot size of the laser beam. This process reveals the role of thermal buildup and lateral heat transfer between pulses. Reconfiguration of the laser to run at an inter-pulse longer than 10 ns but shorter than 1000 ns is likely to modify these dynamics and may be beneficial to the micromachining process.
机译：已经示出了在532nm和355nm的波长下传送100MHz皮秒脉冲的分组的激光系统烧蚀了光伏面板中使用的各种基板中的清洁沟槽。选择波长的能力提供了工艺选择性：532 nm的光会烧蚀非晶硅，但不会烧蚀下面的透明导电氧化物，而355 nm的光会穿过两层。高重复率可确保良好的重叠和彻底的消融。高重复率还可以降低烧蚀阈值，但是在精心调整的情况下，可能会导致剧烈爆炸，从而将直径大于激光束光斑大小几倍的材料清除掉。该过程揭示了脉冲之间的热累积和横向传热的作用。将激光器重新配置为以大于10 ns但小于1000 ns的脉冲间运行很可能会改变这些动态特性，并且可能对微加工过程有利。

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