Nanostructure formation processes in femtosecond laser ablation of thin film surfaces

机译：飞秒激光烧蚀薄膜表面的纳米结构形成过程

获取原文

获取原文并翻译 | 示例

页面导航

摘要
著录项
相似文献
相关主题

摘要

We have studied periodic nanostructure formation processes on hard thin film surfaces in femtosecond laser ablation. Using diamond-like carbon films patterned with submicrometer-size stripes, we found that the nanoscale ablation is preferentially initiated by the enhancement of a local field on the stripe surface having high curvature. Based on the experimental results for the initial stage of nanostructuring, it is concluded that the nanoscale ablation is initiated with the enhanced local field, and the periodicity is developed with the excitation of surface plasmon polaritons.

机译：我们已经研究了飞秒激光烧蚀在硬质薄膜表面上的周期性纳米结构形成过程。使用以亚微米尺寸的条纹图案化的类金刚石碳膜，我们发现纳米级消融优先通过增强具有高曲率的条纹表面上的局部电场来引发。根据纳米结构初始阶段的实验结果，可以得出结论，纳米尺度的烧蚀是由增强的局部电场引发的，周期性的是由表面等离激元极化子的激发而产生的。

著录项

来源
《Conference on laser applications in microelectronic and optoelectronic manufacturing VII; 20090126-29; San Jose, CA(US)》|2009年|P.720102.1-720102.11|共11页
会议地点 San Jose CA(US)
作者
Godai Miyaji; Kenzo Miyazaki;
展开▼
作者单位

Advanced Laser Science Research Section, Institute of Advanced Energy, Kyoto University, Gokasho, Uji, Kyoto, Japan 611-0011;

Advanced Laser Science Research Section, Institute of Advanced Energy, Kyoto University, Gokasho, Uji, Kyoto, Japan 611-0011;

展开▼
会议组织
原文格式 PDF
正文语种 eng
中图分类光电子技术、激光技术;
关键词
femtosecond laser ablation; nanostructuring; local field; surface plasmon polariton; thin film;

机译：飞秒激光烧蚀；纳米结构；局部场；表面等离子体激元；薄膜;

相似文献

外文文献
中文文献
专利

1. Shaping of nanostructured surface in femtosecond laser ablation of thin films [J] . Godai Miyaji, Kenzo Miyazaki Applied Physics A: Materials Science & Processing . 2010,第4期

机译：飞秒激光烧蚀薄膜中纳米结构表面的成形
2. Shaping of nanostructured surface in femtosecond laser ablation of thin films [J] . Godai Miyaji, Kenzo Miyazaki Applied Physics A: Materials Science & Processing . 2010,第4期

机译：飞秒激光烧蚀薄膜中纳米结构表面的成形
3. Study on the effect of ambient gas on nanostructure formation on metal surfaces during femtosecond laser ablation for fabrication of low-reflective surfaces [J] . Smausz Tomi, Csizmadia Tamas, Tapai Csaba, Applied Surface Science . 2016,第deca15期

机译：飞秒激光烧蚀低反射表面过程中环境气体对金属表面纳米结构形成的影响研究
4. Nanostructure formation processes in femtosecond laser ablation ofthin film surfaces [C] . Godai Miyaji, Kenzo Miyazaki SPIE Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing . 2009

机译：在薄膜表面的飞秒激光消融中的纳米结构形成过程
5. Femtosecond laser induced formation of nanostructures on silicon and silver surfaces in liquid nitrogen [D] . Ren, Haizhou. 2015

机译：飞秒激光在液氮中在硅和银表面上形成纳米结构
6. Fabrication of Periodic Nanostructures on Silicon Suboxide Films with Plasmonic Near-Field Ablation Induced by Low-Fluence Femtosecond Laser Pulses [O] . Tatsuyoshi Takaya, Godai Miyaji, Issei Takahashi, 2020

机译：低流量小飞秒激光脉冲诱导等离子体近场消融硅基氧化膜周期纳米结构的制备
7. Study on the effect of ambient gas on nanostructure formation on metal surfaces during femtosecond laser ablation for fabrication of low-reflective surfaces [O] . Smausz Tomi, Csizmadia Tamás, Tápai Csaba, 2016

机译：飞秒激光烧蚀低反射表面过程中环境气体对金属表面纳米结构形成的影响研究

Nanostructure formation processes in femtosecond laser ablation of thin film surfaces

摘要

著录项

相似文献

相关主题

期刊订阅