Advanced micromachining combining nanosecond lasers with water jet-guided laser technology

著录项

• 来源
  《Conference on laser applications in microelectronic and optoelectronic manufacturing VII; 20090126-29; San Jose, CA(US)》|2009年|P.72010A.1-72010A.9|共9页
• 会议地点 San Jose CA(US)
• 作者

  A. Pauchard; K. Lee; N. Vago; M. Pavius; S. Obi;

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• 作者单位

  Synova SA, Ch. Dent d'Oche, 1024 Ecublens, Switzerland;

  Synova SA, Ch. Dent d'Oche, 1024 Ecublens, Switzerland;

  Synova SA, Ch. Dent d'Oche, 1024 Ecublens, Switzerland;

  Synova SA, Ch. Dent d'Oche, 1024 Ecublens, Switzerland;

  Synova SA, Ch. Dent d'Oche, 1024 E;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类 光电子技术、激光技术;
• 关键词

  laser; micromachining; short pulse; water jet-guided laser; grooving; dot marking;

  机译：激光;微加工;短脉冲;水射流引导激光;切槽;点刻;