Three Dimensional Microstructures in Ceramics by Diode Pumped Solid State Lasers

机译：二极管泵浦固态激光器在陶瓷中的三维微观结构

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The application of diode pumped solid state laser radiation for producing three dimensional microstructures is of great interest to materials, which are difficult to structure by conventional machining methods. For obtaining controlled processing and processing results the material removal, the available precision and roughness must be determined. Strategies that permit an efficient manufacturing of structures smaller than 100 μm in ceramics (SiC, Si_3N_4) and hard metals (WC) are developed. The influence of repetition rate, pulse energy, overlap and processing gas atmosphere on material removal, roughness, geometry and recast layer are discussed.

机译：二极管泵浦固态激光辐射在产生三维微观结构中的应用引起了材料的极大兴趣，这些材料难以通过常规的加工方法进行结构化。为了获得受控的加工和加工结果，必须去除材料，确定可用的精度和粗糙度。制定了允许有效制造小于100μm的陶瓷（SiC，Si_3N_4）和硬质金属（WC）结构的策略。讨论了重复率，脉冲能量，重叠和加工气体气氛对材料去除，粗糙度，几何形状和重铸层的影响。

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《Conference on Laser Materials Processing Vol.85e: Rapid Prototyping and Microfabrication, Nov 16-19, 1998, Orlando, FL USA》|1998年|p.64-71|共8页
会议地点 Orlando FL(YS)
作者
R. Weichenhain; A. Horn; J. Jandeleit; E.W. Kreutz;
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作者单位

Lehrstuhl fuer Lasertechnik, Rheinisch-Westfaelische Technische Hochschule Aachen, SteinbachstraBe 15, D-52074 Aachen, Germany;

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原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
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4. Three dimensional microstructures in ceramics by diode pumped solid state lasers [C] . R. Weichenhain, A. Horn, J. Jandeleit, Laser Materials Processing Conference . 1998

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7. Report on CLEO '89/QELS '89 I. New solid state lasers, diode pumped solid state lasers, nonlinear optical materials, lasers for fusion and strong field effects. [O] . Tatsuhiko YAMANAKA, Takatomo SASAKI 1989

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Three Dimensional Microstructures in Ceramics by Diode Pumped Solid State Lasers

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