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首页> 外文会议>Conference on Micro- and Nanoelectronics; 20031006-20031010; Zvenigorod; RU >Linear electrostatic micromotors for nano- and micro-positioning
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Linear electrostatic micromotors for nano- and micro-positioning

机译：用于纳米和微定位的线性静电微电机

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The functioning of the linear step electrostatic film micromotors with the short controlling pulse (less then 100-200 μs) is studied to create nano- and micropositioners. The theoretical study of the step movement of the given mass in this time frame is carried out, The results of the experimental studies of the multipetal reciprocal micromotors created on the basis of La modified Ba_(0.5)Sr_(0.5)Nb_2O_6 ferroelectric films with 1-3 μm thickness are shown. The petals were made of beryllium bronze. It is shown that the electrostatic rolling can last less than 50 us, and the process of separating two surfaces (the metal and the ferroelectric) can last less than 1 μs. These parameters allow one to operate the micromotor at 1-10 kHz frequency, and the propulsion force in the beginning (the first 20-100 μs) of the electrostatic rolling can be as high as 1-10 N per 1 mm~2 of the rolling surface with the voltage pulse amplitude of 40-50 V. The possibility of obtaining moving plate (MP) step in the nanometer range is studied, as well as the precision of these steps during the continuous MP movement with the different clock frequencies and durations of the voltage pulses. The recommendations are given to improve the accuracy and the speed of the positioning in the nano- and micro-movement range. Possible fields of micromotor application are micromechanics, including precision micromechanics, microelectronics, microrobots, microoptics, microscanners, micropumps (e.g. in the jet printers), micro flying vehicles etc.
机译：研究了线性步进静电膜微电机在短控制脉冲（小于100-200μs）下的功能，以创建纳米定位器和微定位器。对给定质量在此时间范围内的步进运动进行了理论研究，基于La修饰的Ba_（0.5）Sr_（0.5）Nb_2O_6铁电薄膜的多瓣往复微电机的实验研究结果显示了-3μm的厚度。花瓣由铍青铜制成。结果表明，静电轧制可持续不到50 us，分离两个表面（金属和铁电体）的过程可持续不到1μs。这些参数允许人们以1-10 kHz的频率运行微型电动机，并且静电轧制开始时（最初的20-100μs）的推进力可高达1-10 N /每1 mm〜2N。电压脉冲幅度为40-50 V的滚动表面。研究了在纳米范围内获得移动板（MP）台阶的可能性，以及在不同时钟频率和持续时间下连续MP运动期间这些台阶的精度电压脉冲。提出了一些建议，以提高在纳米和微米运动范围内的定位精度和速度。微电机的应用领域可能是微机械，包括精密微机械，微电子学，微机器人，微光学，微扫描仪，微泵（例如在喷气打印机中），微型飞行器等。

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