Electron Beam Induced Deposition of Iron Carbon Nanostructures from Iron Dodecacarbonyl Vapour

机译：电子束诱导十二碳羰基铁蒸气中铁碳纳米结构的沉积

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Iron based nanocomposites are of great interest in particular because of their magnetic properties. Preliminary results on image deposition from iron dodecacarbonyl by focused electron beam are presented. The specific electric resistance of fabricated lines was measured in the range from from 4·10~(-2) дo 10~3 Ω cm dependency on deposition conditions. It was observed, that if the beam current increases, specific resistance sharply decreases. Positive temperature coefficient of conductivity for such material was determined. Effective activation energy of conductivity changed from 3-5kJ/mol for high conductivity lines to 15-25kJ/mol for low conductivity lines. Obtained data are considered on the base of representations of produced lines material as nanoclusters of iron spread in amorphous carbon matrix. The resistance change of deposited lines in media of different vapours and gases was estimated.

机译：铁基纳米复合材料特别令人关注，因为它们具有磁性。给出了通过聚焦电子束从十二羰基铁沉积图像的初步结果。取决于沉积条件，在4×10〜（-2）〜10〜3Ωcm的范围内测量装配线的电阻率。观察到，如果束电流增加，则电阻率急剧降低。确定了这种材料的正电导率温度系数。电导率的有效活化能从高电导率线的3-5kJ / mol变为低电导率线的15-25kJ / mol。根据生产线材料在无定形碳基质中扩散的铁的纳米团簇的表示形式来考虑获得的数据。估算了在不同蒸气和气体介质中沉积线的电阻变化。

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来源
《Conference on Micro- and Nanoelectronics; 20031006-20031010; Zvenigorod; RU》|2003年|P.305-310|共6页
会议地点 Zvenigorod(RU);Zvenigorod(RU);Zvenigorod(RU)
作者
M.A.Bruk; E.N.Zhikharev; E.I.Grigoriev; A.V.Spirin; V.A.Kalnov; I.E.Kardash;
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作者单位

Karpov Institute of Physical Chemistry, Russia;

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原文格式 PDF
正文语种 eng
中图分类微电子学、集成电路（IC）;
关键词
lectron beam deposition; iron dodecacarbonyl; nanocomposites conductivity model;

机译：电子束沉积；十二羰基铁；纳米复合材料电导模型;

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专利

1. Focused electron beam-induced deposition of iron- and carbon-containing nanostructures from triiron dodecacarbonyl vapor [J] . Bruk MA, Zhikharev EN, Grigorev EI, High Energy Chemistry . 2005,第2期

机译：聚焦电子束诱导的三铁十二碳羰基蒸气沉积的铁和碳纳米结构
2. Fabrication of nanostructures with different iron concentration by electron beam induced deposition with a mixture gas of iron carbonyl and ferrocene, and their magnetic properties [J] . Takeguchi M, Shimojo M, Mitsuishi K, Journal of Materials Science . 2006,第14期

机译：电子束诱导的羰基铁与二茂铁混合气体的电子束沉积制备不同铁浓度的纳米结构及其磁性
3. Fabrication of nanostructures with different iron concentration by electron beam induced deposition with a mixture gas of iron carbonyl and ferrocene, and their magnetic properties [J] . M. Takeguchi, M. Shimojo, K. Mitsuishi, Journal of Materials Science . 2006,第14期

机译：电子束诱导的羰基铁与二茂铁混合气体电子沉积法制备不同铁浓度的纳米结构及其磁性
4. Electron Beam Induced Deposition of Iron Carbon Nanostructures from Iron Dodecacarbonyl Vapour [C] . M.A.Bruk, E.N.Zhikharev, E.I.Grigoriev, Society of Photo-Optical Instrumentation Engineers Conference on Micro- and Nanoelectronics . 2004

机译：电子束从铁十二烷羰基蒸气诱导铁碳纳米结构沉积
5. Electron beam induced deposition (EBID) of carbon interface between carbon nanotube interconnect and metal electrode. [D] . Rykaczewski, Konrad. 2009

机译：碳纳米管互连和金属电极之间的碳界面的电子束诱导沉积（EBID）。
6. Comparing postdeposition reactions of electrons and radicals with Pt nanostructures created by focused electron beam induced deposition [O] . Julie A Spencer, Michael Barclay, Miranda J Gallagher, 2017

机译：比较电子和自由基的后沉积反应与聚焦电子束诱导沉积产生的Pt纳米结构
7. Iron Nanostructures fabricated by Electron Beam Induced Deposition and Its Magnetic Properties [O] . Kazuo Furuyaa, Masaki Takeguchi, Kazutaka Mitsuishi 2015

机译：电子束诱导沉积制备铁纳米结构及其磁性

Electron Beam Induced Deposition of Iron Carbon Nanostructures from Iron Dodecacarbonyl Vapour

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