Uncooled infrared and terahertz detectors based on micromechanical mirror as a radiation pressure sensor

著录项

• 来源
  《Conference on micromachining and microfabrication process technology XIV; 20090127; San Jose, CA(US)》|2009年|P.720403.1-720403.12|共12页
• 会议地点 San Jose CA(US)
• 作者

  Gennady P. Berman; Boris M. Chernobrod; Alan R. Bishop; Vyacheslav N. Gorshkov;

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• 作者单位

  Theoretical Division and CNLS, Los Alamos National Laboratory, MS 213, Los Alamos, New Mexico 87545;

  Theoretical Division and CNLS, Los Alamos National Laboratory, MS 213, Los Alamos, New Mexico 87545;

  Theory, Simulation Computation Directorate, MS B210,;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类 微电子学、集成电路（IC）;
• 关键词

  terahertz; cantilever; radiation pressure; micromirror;

  机译：太赫兹;悬臂;辐射压力;微镜;